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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Vol. 18, Iss. 8 — Aug. 1, 2001
  • pp: 1980–1985

Alignment and calibration of the MgF2 biplate compensator for applications in rotating-compensator multichannel ellipsometry

Joungchel Lee, P. I. Rovira, Ilsin An, and R. W. Collins  »View Author Affiliations

JOSA A, Vol. 18, Issue 8, pp. 1980-1985 (2001)

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Biplate compensators made from MgF<sub>2</sub> are being used increasingly in rotating-element single-channel and multichannel ellipsometers. For the measurement of accurate ellipsometric spectra, the compensator must be carefully (i) aligned internally to ensure that the fast axes of the two plates are perpendicular and (ii) calibrated to determine the phase retardance δ versus photon energy <i>E</i>. We present alignment and calibration procedures for multichannel ellipsometer configurations with special attention directed to the precision, accuracy, and reproducibility in the determination of δ(E). Run-to-run variations in external compensator alignment, i.e., alignment with respect to the incident beam, can lead to irreproducibilities in δ of ~0.2°. Errors in the ellipsometric measurement of a sample can be minimized by calibrating with an external compensator alignment that matches as closely as possible that used in the measurement.

© 2001 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.5410) Instrumentation, measurement, and metrology : Polarimetry
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation
(220.1140) Optical design and fabrication : Alignment
(260.2130) Physical optics : Ellipsometry and polarimetry
(260.5430) Physical optics : Polarization

Joungchel Lee, P. I. Rovira, Ilsin An, and R. W. Collins, "Alignment and calibration of the MgF2 biplate compensator for applications in rotating-compensator multichannel ellipsometry," J. Opt. Soc. Am. A 18, 1980-1985 (2001)

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