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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Vol. 18, Iss. 8 — Aug. 1, 2001
  • pp: 1980–1985

Alignment and calibration of the MgF2 biplate compensator for applications in rotating-compensator multichannel ellipsometry

Joungchel Lee, P. I. Rovira, Ilsin An, and R. W. Collins  »View Author Affiliations

JOSA A, Vol. 18, Issue 8, pp. 1980-1985 (2001)

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Biplate compensators made from MgF2 are being used increasingly in rotating-element single-channel and multichannel ellipsometers. For the measurement of accurate ellipsometric spectra, the compensator must be carefully (i) aligned internally to ensure that the fast axes of the two plates are perpendicular and (ii) calibrated to determine the phase retardance δ versus photon energy E. We present alignment and calibration procedures for multichannel ellipsometer configurations with special attention directed to the precision, accuracy, and reproducibility in the determination of δ(E). Run-to-run variations in external compensator alignment, i.e., alignment with respect to the incident beam, can lead to irreproducibilities in δ of ∼0.2°. Errors in the ellipsometric measurement of a sample can be minimized by calibrating with an external compensator alignment that matches as closely as possible that used in the measurement.

© 2001 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.5410) Instrumentation, measurement, and metrology : Polarimetry
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation
(220.1140) Optical design and fabrication : Alignment
(260.2130) Physical optics : Ellipsometry and polarimetry
(260.5430) Physical optics : Polarization

Original Manuscript: October 25, 2000
Revised Manuscript: January 16, 2001
Manuscript Accepted: January 16, 2001
Published: August 1, 2001

Joungchel Lee, P. I. Rovira, Ilsin An, and R. W. Collins, "Alignment and calibration of the MgF2 biplate compensator for applications in rotating-compensator multichannel ellipsometry," J. Opt. Soc. Am. A 18, 1980-1985 (2001)

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  1. Z. Sekera, “Light scattering in the atmosphere and the polarization of sky light,” J. Opt. Soc. Am. 47, 484–490 (1957). [CrossRef]
  2. P. S. Hauge, F. H. Dill, “A rotating-compensator Fourier ellipsometer,” Opt. Commun. 14, 431–437 (1975). [CrossRef]
  3. J. Lee, P. I. Rovira, I. An, R. W. Collins, “Rotating-compensator multichannel ellipsometry: applications for real time Stokes vector spectroscopy of thin film growth,” Rev. Sci. Instrum. 69, 1800–1810 (1998). [CrossRef]
  4. R. M. A. Azzam, “Photopolarimetric measurement of the Mueller matrix by Fourier analysis of a single detected signal,” Opt. Lett. 2, 148–150 (1978). [CrossRef] [PubMed]
  5. P. S. Hauge, “Mueller matrix ellipsometry with imperfect compensators,” J. Opt. Soc. Am. 68, 1519–1528 (1978). [CrossRef]
  6. R. W. Collins, J. Koh, “Dual rotating-compensator multichannel ellipsometer: instrument design for real-time Mueller matrix spectroscopy of surfaces and films,” J. Opt. Soc. Am. A 16, 1997–2006 (1999). [CrossRef]
  7. W. A. Shurcliff, Polarized Light: Production and Use (Harvard University, Cambridge, Mass., 1962).
  8. D. Clarke, J. F. Grainger, Polarized Light and Optical Measurement (Pergamon, New York, 1971).
  9. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
  10. J. M. Bennett, H. E. Bennett, “Polarization,” in Handbook of Optics, W. G. Driscoll, W. Vaughan, eds. (McGraw-Hill, New York, 1978), pp. 10-1–10-164.
  11. R. A. Yarussi, A. R. Heyd, H. V. Nguyen, R. W. Collins, “Multichannel transmission ellipsometer for characterization of anisotropic optical materials,” J. Opt. Soc. Am. A 11, 2320–2330 (1994). [CrossRef]
  12. D. E. Aspnes, “Alignment of an optically active biplate compensator,” Appl. Opt. 10, 2545–2546 (1971). [CrossRef] [PubMed]
  13. D. E. Aspnes, “Effects of component optical activity in data reduction and calibration of rotating-analyzer ellipsometers,” J. Opt. Soc. Am. 64, 812–819 (1974). [CrossRef]
  14. D. M. Radman, B. D. Cahan, “Errors in ‘Effects of component optical activity in data reduction and calibration of rotating-analyzer ellipsometers’,” J. Opt. Soc. Am. 71, 1546 (1981). [CrossRef]
  15. J. M. M. de Nijs, A. van Silfhout, “Systematic and random errors in rotating-analyzer ellipsometry,” J. Opt. Soc. Am. A 5, 773–781 (1988). [CrossRef]
  16. R. W. Collins, “Automatic rotating element ellipsometers: calibration, operation, and real-time applications,” Rev. Sci. Instrum. 61, 2029–2062 (1990). [CrossRef]
  17. J. Opsal, J. Fanton, J. Chen, J. Leng, L. Wei, C. Uhrich, M. Senko, C. Zaiser, D. E. Aspnes, “Broadband spectral operation of a rotating-compensator ellipsometer,” Thin Solid Films 313–314, 58–61 (1998). [CrossRef]
  18. N. V. Nguyen, B. S. Pudliner, I. An, R. W. Collins, “Error correction for calibration and data reduction in rotating-polarizer ellipsometry: applications to a novel multichannel ellipsometer,” J. Opt. Soc. Am. A 8, 919–931 (1991). [CrossRef]
  19. I. An, J. Lee, B. Hong, R. W. Collins, “Simultaneous determination of reflectance spectra along with {ψ(E),Δ(E)} in multichannel ellipsometry: applications to instrument calibration and reduction of real-time data,” Thin Solid Films 313–314, 79–84 (1998). [CrossRef]
  20. T. M. Cotter, M. E. Thomas, W. J. Tropf, “Magnesium fluoride (MgF2),” in Handbook of Optical Constants of Solids II, E. D. Palik, ed. (Academic, New York, 1991), pp. 899–918.
  21. J. Lee, J. Koh, R. W. Collins, “Dual rotating-compensator multichannel ellipsometer: instrument development for high-speed Mueller matrix spectroscopy of surfaces and films,” Rev. Sci. Instrum. 72, 1742–1754 (2001). [CrossRef]
  22. P. Chindaudom, K. Vedam, “Optical characterization of inhomogeneous transparent films on transparent substrates by spectroscopic ellipsometry, '’ in Optical Characterization of Real Surface and Films, K. Vedam, ed. (Academic, New York, 1994), pp. 191–247.
  23. R. Kleim, L. Kunstler, A. El Ghemmaz, “Systematic errors in rotating-compensator ellipsometry,” J. Opt. Soc. Am. A 11, 2550–2559 (1994). [CrossRef]

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