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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Vol. 19, Iss. 1 — Jan. 1, 2002
  • pp: 24–32

Characterization of optical diffraction gratings by use of a neural method

Stéphane Robert, Alain Mure-Ravaud, and Dominique Lacour  »View Author Affiliations

JOSA A, Vol. 19, Issue 1, pp. 24-32 (2002)

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Optical scatterometry by use of a neural network is now recognized as an efficient method for retrieving dimensions of gratings in semiconductors or glasses. For an on-line control, a small number of measurements and a rapid data treatment are needed. We demonstrate that these requirements can be met by combining data preprocessing and a proper neural learning method. A good accuracy is attainable with the measurement of only a few orders, even in the presence of experimental errors, with a reduction in learning and computing time.

© 2002 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(200.4260) Optics in computing : Neural networks

Original Manuscript: January 15, 2001
Revised Manuscript: April 24, 2001
Manuscript Accepted: April 24, 2001
Published: January 1, 2002

Stéphane Robert, Alain Mure-Ravaud, and Dominique Lacour, "Characterization of optical diffraction gratings by use of a neural method," J. Opt. Soc. Am. A 19, 24-32 (2002)

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