OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 19, Iss. 12 — Dec. 1, 2002
  • pp: 2394–2402

Experimental characterization of subwavelength diffraction gratings by an inverse-scattering neural method

Stéphane Robert, Alain Mure Ravaud, Stéphanie Reynaud, Sabine Fourment, Franck Carcenac, and Philippe Arguel  »View Author Affiliations


JOSA A, Vol. 19, Issue 12, pp. 2394-2402 (2002)
http://dx.doi.org/10.1364/JOSAA.19.002394


View Full Text Article

Enhanced HTML    Acrobat PDF (480 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Characterization of gratings with small period-to-wavelength ratios is difficult to perform but is very helpful in improving the fabrication process. We experimentally tested an inverse-scattering method using a neural network on silicon etched gratings. We also characterized the gratings by using two popular microscopic methods. The validity of each method was determined by comparing measured diffracted intensities with calculated ones obtained from measured profiles. An estimation of accuracy and repeatability was deduced from a scan along a grating sample. This method was thus well validated for nondestructive and noninvasive measurements under experimental conditions that were close conditions of actual usage. This method is easy to implement and requires the measurement of only a few diffracted intensities.

© 2002 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(200.4260) Optics in computing : Neural networks

History
Original Manuscript: March 6, 2002
Revised Manuscript: May 28, 2002
Manuscript Accepted: May 28, 2002
Published: December 1, 2002

Citation
Stéphane Robert, Alain Mure Ravaud, Stéphanie Reynaud, Sabine Fourment, Franck Carcenac, and Philippe Arguel, "Experimental characterization of subwavelength diffraction gratings by an inverse-scattering neural method," J. Opt. Soc. Am. A 19, 2394-2402 (2002)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-19-12-2394

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited