Abstract

Imaging properties of a birefringent lens, in which the fast (or the slow) axis is distributed in the radial direction whereas magnitude of birefringence varies as a quadratic function of the pupil radius, are investigated by calculating a point-spread function. It is found that the point image is analytically described by using the Lommel function as well as the zero-order Bessel function, and a localized intensity null surrounded by bright regions in all directions can be realized at a geometrical focus under certain conditions. The magnitude of birefringence that is tolerable in image formations is also discussed, assuming that the lens is applied to microlithography.

© 2002 Optical Society of America

Aberrated point-spread functions for rotationally symmetric aberrations

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