An extension of an approximate step-transition perturbation method is presented that permits numerically efficient diffraction analysis of pixel-structured surface profiles in the nonparaxial domain. Comparison with the rigorous diffraction theory of gratings shows that the method is reasonably accurate provided that the pixel size exceeds approximately two wavelengths even if the structure contains isolated pixels.
© 2002 Optical Society of America
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1380) Diffraction and gratings : Binary optics
(050.1950) Diffraction and gratings : Diffraction gratings
(050.1960) Diffraction and gratings : Diffraction theory
Tuomas Vallius, Markku Kuittinen, Jari Turunen, and Ville Kettunen, "Step-transition perturbation approach for pixel-structured nonparaxial diffractive elements," J. Opt. Soc. Am. A 19, 1129-1135 (2002)