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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Vol. 2, Iss. 5 — May. 1, 1985
  • pp: 713–722

Sensitivity extrema in multiple-angle ellipsometry

J. Humlíček  »View Author Affiliations

JOSA A, Vol. 2, Issue 5, pp. 713-722 (1985)

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A quantitative study of sensitivity of multiple-angle-of-incidence ellipsometry in determining several parameters of stratified structures is presented. The principles of determination of parameter errors caused by random and systematic errors in measured ellipsometric angles and by the use of incorrect values of fixed parameters are given. An appropriate choice of angles of incidence is discussed. The sensitivity for dielectric films on low-loss substrates is studied in detail, and large variations with the parameters, especially with film thickness-to-wavelength ratio, are observed.

© 1985 Optical Society of America

Original Manuscript: July 26, 1984
Manuscript Accepted: December 13, 1984
Published: May 1, 1985

J. Humlíček, "Sensitivity extrema in multiple-angle ellipsometry," J. Opt. Soc. Am. A 2, 713-722 (1985)

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  1. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
  2. M. M. Ibrahim, N. M. Bashara, “Parameter-correlation and computational considerations in multiple-angle ellipsometry,”J. Opt. Soc. Am. 61, 1622 (1971). [CrossRef]
  3. G. H. Bu-Abbud, N. M. Bashara, “Parameter correlation and precision in multiple-angle ellipsometry,” Appl. Opt. 20, 3020 (1981). [CrossRef] [PubMed]
  4. W. T. Eadie, D. Dryard, F. E. James, M. Roos, B. Sadoulet, Statistical Methods in Experimental Physics (North-Holland, Amsterdam, 1971).
  5. Y. Gaillyová, E. Schmidt, J. Humlíček, “Multiple-angle ellipsometry of Si–SiO2polycrystalline Si system,” J. Opt. Soc. Am. A 2, 723–726 (1985). [CrossRef]
  6. J. Humlíček, “Evaluation of derivatives of reflectance and transmittance by stratified structures and solution of the reverse problem of ellipsometry,” Opt. Acta 30, 97–105 (1983). [CrossRef]
  7. J. H. Wilkinson, C. Reinsch, Handbook for Automatic Computation, Linear Algebra (Springer-Verlag, Heildelberg, 1972).

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