We employed the integral equation method (IEM) to simulate optical scattering by a randomly rough surface for spectroscopic ellipsometry. An explicit Mueller-matrix expression of the IEM for single scattering by moderately small surface roughness makes it possible to calculate the depolarization effect. The IEM allows a relatively rigorous assessment of the surface-scattering effect in a wide spectral range.
© 2003 Optical Society of America
Original Manuscript: December 22, 2002
Revised Manuscript: March 4, 2003
Manuscript Accepted: March 4, 2003
Published: June 1, 2003
Kyung Hoon Jun, Joong Hwan Kwak, and Koeng Su Lim, "Simulation of depolarization effect by a rough surface for spectroscopic ellipsometry," J. Opt. Soc. Am. A 20, 1060-1066 (2003)