Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Simulation of depolarization effect by a rough surface for spectroscopic ellipsometry

Not Accessible

Your library or personal account may give you access

Abstract

We employed the integral equation method (IEM) to simulate optical scattering by a randomly rough surface for spectroscopic ellipsometry. An explicit Mueller-matrix expression of the IEM for single scattering by moderately small surface roughness makes it possible to calculate the depolarization effect. The IEM allows a relatively rigorous assessment of the surface-scattering effect in a wide spectral range.

© 2003 Optical Society of America

Full Article  |  PDF Article
More Like This
Spectroscopic ellipsometry of very rough surfaces

Subiao Bian and Oriol Arteaga
Opt. Express 31(12) 19632-19645 (2023)

Depolarization and cross polarization in ellipsometry of rough surfaces

Molly W. Williams
Appl. Opt. 25(20) 3616-3622 (1986)

Simulation of the depolarization effect in porous silicon

Kyung Hoon Jun and Koeng Su Lim
Appl. Opt. 42(7) 1211-1215 (2003)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (41)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved