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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Vol. 20, Iss. 6 — Jun. 1, 2003
  • pp: 1060–1066

Simulation of depolarization effect by a rough surface for spectroscopic ellipsometry

Kyung Hoon Jun, Joong Hwan Kwak, and Koeng Su Lim  »View Author Affiliations

JOSA A, Vol. 20, Issue 6, pp. 1060-1066 (2003)

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We employed the integral equation method (IEM) to simulate optical scattering by a randomly rough surface for spectroscopic ellipsometry. An explicit Mueller-matrix expression of the IEM for single scattering by moderately small surface roughness makes it possible to calculate the depolarization effect. The IEM allows a relatively rigorous assessment of the surface-scattering effect in a wide spectral range.

© 2003 Optical Society of America

OCIS Codes
(240.5770) Optics at surfaces : Roughness
(260.2130) Physical optics : Ellipsometry and polarimetry
(290.5880) Scattering : Scattering, rough surfaces

Original Manuscript: December 22, 2002
Revised Manuscript: March 4, 2003
Manuscript Accepted: March 4, 2003
Published: June 1, 2003

Kyung Hoon Jun, Joong Hwan Kwak, and Koeng Su Lim, "Simulation of depolarization effect by a rough surface for spectroscopic ellipsometry," J. Opt. Soc. Am. A 20, 1060-1066 (2003)

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