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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Vol. 20, Iss. 8 — Aug. 1, 2003
  • pp: 1651–1657

Error analysis for Mueller matrix measurement

Soe-Mie F. Nee  »View Author Affiliations

JOSA A, Vol. 20, Issue 8, pp. 1651-1657 (2003)

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The linear errors of Mueller matrix measurements are formulated for misalignment, depolarization, and incorrect retardation of the polarimetric components. The measured errors of a Mueller matrix depend not only on the imperfections of the measuring system but also on the Mueller matrix itself. The error matrices for different polarimetric systems are derived and also evaluated for the straight-through case. The error matrix for a polarizer–sample–analyzer system is much simpler than those for more complicated systems. The general error matrix is applied to null ellipsometry, and the obtained errors in ellipsometric parameters ψ and Δ are identical to the errors specifically derived for null ellipsometry with depolarization.

© 2003 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(120.5410) Instrumentation, measurement, and metrology : Polarimetry
(260.5430) Physical optics : Polarization

Original Manuscript: January 16, 2003
Revised Manuscript: April 11, 2003
Manuscript Accepted: April 11, 2003
Published: August 1, 2003

Soe-Mie F. Nee, "Error analysis for Mueller matrix measurement," J. Opt. Soc. Am. A 20, 1651-1657 (2003)

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  1. R. M. A. Azzam, “Photopolarimetric measurement of the Mueller matrix by Fourier analysis of a single detected signal,” Opt. Lett. 2, 148–150 (1978). [CrossRef] [PubMed]
  2. D. H. Goldstein, R. A. Chipman, “Error analysis of a Mueller matrix polarimeter,” J. Opt. Soc. Am. A 7, 693–700 (1990). [CrossRef]
  3. D. H. Goldstein, “Mueller matrix dual-rotating retarder polarimeter,” Appl. Opt. 31, 6676–6683 (1992). [CrossRef] [PubMed]
  4. D. A. Ramsey, K. C. Ludema, “The influences of roughness on film thickness measurements by Mueller matrix ellipsometry,” Rev. Sci. Instrum. 65, 2874–2881 (1994). [CrossRef]
  5. B. Boulbry, B. Le Jeunne, B. Bousquet, F. Pellen, J. Cariou, J. Lotrian, “Error analysis and calibration of a spectroscopic Mueller matrix polarimeter using a short-pulse laser source,” Meas. Sci. Technol. 13, 1563–1573 (2002). [CrossRef]
  6. S.-M. F. Nee, “Error analysis of null ellipsometry with depolarization,” Appl. Opt. 38, 5388–5398 (1999). [CrossRef]
  7. S.-M. F. Nee, “Depolarization and principal Mueller matrix measured by null ellipsometry,” Appl. Opt. 40, 4933–4939 (2001). [CrossRef]
  8. K. A. O’Donnell, M. E. Knotts, “Polarization dependence of scattering from one-dimensional rough surfaces,” J. Opt. Soc. Am. A 8, 1126–1131 (1991). [CrossRef]
  9. T. F. Schiff, J. C. Stover, B. D. Swimley, D. R. Bjork, “Mueller matrix measurements of scattered light,” in Stray Radiation in Optical Systems II, R. P. Breult, ed., Proc. SPIE1753, 269–277 (1992). [CrossRef]
  10. R. M. A. Azzam, N. M. Bashara, “Ellipsometry with im-perfect components including incoherent effects,” J. Opt. Soc. Am. 61, 1380–1391 (1977). [CrossRef]
  11. S.-M. F. Nee, “Error reduction for a serious compensator imperfection for null ellipsometry,” J. Opt. Soc. Am. A 8, 314–321 (1991). [CrossRef]
  12. S.-M. F. Nee, C. Yoo, T. Cole, D. Burge, “Characterization for imperfect polarizers under imperfect conditions,” Appl. Opt. 37, 54–64 (1998). [CrossRef]
  13. S.-M. F. Nee, T. Cole, “Effects of depolarization of optical components on null ellipsometry,” Thin Solid Films 313–314, 90–96 (1998). [CrossRef]
  14. S.-M. F. Nee, “Depolarization and retardation of a birefringent slab,” J. Opt. Soc. Am. A 17, 2067–2073 (2000). [CrossRef]
  15. S.-M. F. Nee, “Polarization of specular reflection and near-specular scattering by a rough surface,” Appl. Opt. 35, 3570–3582 (1996). [CrossRef]
  16. W. A. Shurcliff, S. S. Ballard, Polarized Light (Van Nostrand, Princeton, N.J., 1964).
  17. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North Holland, Amsterdam, 1977).
  18. R. A. Chipman, “Polarimetry,” in Handbook of Optics, Vol. II, M. Bass, E. W. Van Stryland, D. R. Williams, W. L. Wolfe, eds. (McGraw-Hill, New York, 1995), Chap. 22.
  19. S.-M. F. Nee, “Polarization measurement,” in The Measurement, Instrumentation and Sensors Handbook, J. G. Webster, ed. (CRC and IEEE, Boca Raton, 1999), Chap. 60.
  20. S.-M. F. Nee, C. Yoo, T. Cole, D. Burge, “Characterization of infrared polarizer,” in Polarization: Measurement, Analysis and Remote Sensing, D. H. Goldstein, R. A. Chipman, eds., Proc. SPIE3121, 213–224 (1997).

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