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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 21, Iss. 2 — Feb. 1, 2004
  • pp: 252–262

Measurement of random processes at rough surfaces with digital speckle correlation

Thomas Fricke-Begemann and Klaus D. Hinsch  »View Author Affiliations


JOSA A, Vol. 21, Issue 2, pp. 252-262 (2004)
http://dx.doi.org/10.1364/JOSAA.21.000252


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Abstract

We present a detailed investigation of digital speckle correlation to measure small changes in the microstructure of random rough surfaces. The corresponding alterations in the scattered-light field are recorded by an electronic camera with subsequent numerical correlation. Among the classical theoretical approaches to describe the scattering at random rough surfaces, the composite-roughness model is advanced to calculate the speckle correlation in terms of parameters of the changes in surface microstructure. For an experimental verification, surfaces with similar microstructure are fabricated with a photolithographic technique. They are employed for comparative measurements with high-resolution scanning force microscopy and for correlation measurements under variation of experimental parameters. A good agreement between theoretically predicted and experimental correlation data can be observed. The results allow a quantitative whole-field monitoring of surface processes by remote optical means.

© 2004 Optical Society of America

OCIS Codes
(030.6140) Coherence and statistical optics : Speckle
(100.4550) Image processing : Correlators
(120.6150) Instrumentation, measurement, and metrology : Speckle imaging
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(290.5880) Scattering : Scattering, rough surfaces

History
Original Manuscript: March 2, 2003
Revised Manuscript: August 11, 2003
Manuscript Accepted: September 24, 2003
Published: February 1, 2004

Citation
Thomas Fricke-Begemann and Klaus D. Hinsch, "Measurement of random processes at rough surfaces with digital speckle correlation," J. Opt. Soc. Am. A 21, 252-262 (2004)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-21-2-252

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