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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Vol. 21, Iss. 7 — Jul. 1, 2004
  • pp: 1186–1191

Diffraction-based solid immersion lens

Robert Brunner, Matthias Burkhardt, Alexander Pesch, Oliver Sandfuchs, Margit Ferstl, Sungchul Hohng, and Jeffrey O. White  »View Author Affiliations

JOSA A, Vol. 21, Issue 7, pp. 1186-1191 (2004)

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A solid immersion lens based on diffraction (dSIL) is proposed as an alternative to the conventional design based on refraction. A design analogous to a Fresnel zone plate is derived in accordance with the Huygens–Fresnel principle. Fabrication of a binary dSIL is achieved by electron-beam lithography and reactive-ion etching on LaSF35, with index n=2.014. Measurement of the point-spread function is performed with near-field optical microscopy. The results are in accord with the expected resolution enhancement of a factor n with respect to the diffraction limit.

© 2004 Optical Society of America

OCIS Codes
(050.1380) Diffraction and gratings : Binary optics
(050.1970) Diffraction and gratings : Diffractive optics
(090.2890) Holography : Holographic optical elements
(110.0180) Imaging systems : Microscopy
(180.5810) Microscopy : Scanning microscopy
(220.4000) Optical design and fabrication : Microstructure fabrication

Original Manuscript: August 21, 2003
Revised Manuscript: January 8, 2004
Manuscript Accepted: January 8, 2004
Published: July 1, 2004

Robert Brunner, Margit Ferstl, Sungchul Hohng, Jeffrey O. White, Matthias Burkhardt, Alexander Pesch, and Oliver Sandfuchs, "Diffraction-based solid immersion lens," J. Opt. Soc. Am. A 21, 1186-1191 (2004)

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