Diffraction-based solid immersion lens
JOSA A, Vol. 21, Issue 7, pp. 1186-1191 (2004)
http://dx.doi.org/10.1364/JOSAA.21.001186
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Abstract
A solid immersion lens based on diffraction (dSIL) is proposed as an alternative to the conventional design based on refraction. A design analogous to a Fresnel zone plate is derived in accordance with the Huygens–Fresnel principle. Fabrication of a binary dSIL is achieved by electron-beam lithography and reactive-ion etching on LaSF35, with index n = 2.014. Measurement of the point-spread function is performed with near-field optical microscopy. The results are in accord with the expected resolution enhancement of a factor n with respect to the diffraction limit.
© 2004 Optical Society of America
OCIS Codes
(050.1380) Diffraction and gratings : Binary optics
(050.1970) Diffraction and gratings : Diffractive optics
(090.2890) Holography : Holographic optical elements
(110.0180) Imaging systems : Microscopy
(180.5810) Microscopy : Scanning microscopy
(220.4000) Optical design and fabrication : Microstructure fabrication
Citation
Robert Brunner, Matthias Burkhardt, Alexander Pesch, Oliver Sandfuchs, Margit Ferstl, Sungchul Hohng, and Jeffrey O. White, "Diffraction-based solid immersion lens," J. Opt. Soc. Am. A 21, 1186-1191 (2004)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-21-7-1186
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