OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 21, Iss. 7 — Jul. 1, 2004
  • pp: 1186–1191

Diffraction-based solid immersion lens

Robert Brunner, Matthias Burkhardt, Alexander Pesch, Oliver Sandfuchs, Margit Ferstl, Sungchul Hohng, and Jeffrey O. White  »View Author Affiliations


JOSA A, Vol. 21, Issue 7, pp. 1186-1191 (2004)
http://dx.doi.org/10.1364/JOSAA.21.001186


View Full Text Article

Acrobat PDF (733 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A solid immersion lens based on diffraction (dSIL) is proposed as an alternative to the conventional design based on refraction. A design analogous to a Fresnel zone plate is derived in accordance with the Huygens–Fresnel principle. Fabrication of a binary dSIL is achieved by electron-beam lithography and reactive-ion etching on LaSF35, with index n = 2.014. Measurement of the point-spread function is performed with near-field optical microscopy. The results are in accord with the expected resolution enhancement of a factor n with respect to the diffraction limit.

© 2004 Optical Society of America

OCIS Codes
(050.1380) Diffraction and gratings : Binary optics
(050.1970) Diffraction and gratings : Diffractive optics
(090.2890) Holography : Holographic optical elements
(110.0180) Imaging systems : Microscopy
(180.5810) Microscopy : Scanning microscopy
(220.4000) Optical design and fabrication : Microstructure fabrication

Citation
Robert Brunner, Matthias Burkhardt, Alexander Pesch, Oliver Sandfuchs, Margit Ferstl, Sungchul Hohng, and Jeffrey O. White, "Diffraction-based solid immersion lens," J. Opt. Soc. Am. A 21, 1186-1191 (2004)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-21-7-1186


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. S. M. Mansfield and G. S. Kino, “Solid immersion microscope,” Appl. Phys. Lett. 57, 2615–2616 (1990).
  2. C. D. Poweleit, A. Gunther, S. Goodnick, and J. Menendez, “Raman imaging of patterned silicon using a solid immersion lens,” Appl. Phys. Lett. 73, 2275–2277 (1998).
  3. Qiang Wu, G. D. Feke, R. D. Grober, and L. P. Ghislain, “Realization of numerical aperture 2.0 using a gallium phosphide solid immersion lens,” Appl. Phys. Lett. 75, 4064–4066 (1999).
  4. K. Koyama, M. Yoshita, M. Baba, T. Suemoto, and H. Akiyama, “High collection efficiency in fluorescence microscopy with a solid immersion lens,” Appl. Phys. Lett. 75, 1667–1669 (1999).
  5. T. D. Milster, “Chromatic correction of high-performance solid immersion lens systems,” Jpn. J. Appl. Phys. 38, 1777–1779 (1999).
  6. M. Baba, T. Sasaki, M. Yoshita, and H. Akiyama, “Aberrations and allowances for errors in a hemisphere solid immersion lens for submicron-resolution photoluminescence microscopy,” J. Appl. Phys. 85, 6923–6925 (1999).
  7. M. G. Moharam and T. K. Gaylord, “Diffraction analysis of dielectric surface-relief gratings,” J. Opt. Soc. Am. 72, 1385–1392 (1982).
  8. J. Bischoff, “Beitraege zur theoretischen und experimentellen Untersuchung der Lichtbeugung an mikrostrukturierten Mehrschichtsystemen,” Habilitation thesis (Ilmenau Technical University, Ilmenau, Germany, 2001).
  9. L. Li, “Use of Fourier series in the analysis of discontinuous periodic structures,” J. Opt. Soc. Am. A 13, 1870–1876 (1996).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited