OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Editor: Stephen A. Burns
  • Vol. 22, Iss. 12 — Dec. 1, 2005
  • pp: 2786–2798

Fabry–Perot metrology for displacements up to 50 mm

John R. Lawall  »View Author Affiliations

JOSA A, Vol. 22, Issue 12, pp. 2786-2798 (2005)

View Full Text Article

Enhanced HTML    Acrobat PDF (178 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A system designed to apply Fabry–Perot interferometry to the measurement of displacements is described. Two adjacent modes of a Fabry–Perot cavity are probed, and both the absolute optical frequencies and their difference are used to determine displacements via changes in cavity length. Light is coupled to the cavity via an optical fiber, making the system ideal for remote sensing applications. Continuous interrogation is not necessary, as the cavity length is encoded in the free spectral range. The absolute uncertainty is determined to be below 10 pm , which for the largest displacement measured corresponds to a relative uncertainty of 4 × 10 10 . To my knowledge this is the smallest relative uncertainty in a displacement measurement ever demonstrated.

© 2005 Optical Society of America

OCIS Codes
(120.0280) Instrumentation, measurement, and metrology : Remote sensing and sensors
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(120.3180) Instrumentation, measurement, and metrology : Interferometry

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: February 4, 2005
Revised Manuscript: April 28, 2005
Manuscript Accepted: May 11, 2005
Published: December 1, 2005

John R. Lawall, "Fabry–Perot metrology for displacements up to 50 mm," J. Opt. Soc. Am. A 22, 2786-2798 (2005)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. N. Bobroff, “Recent advances in displacement measuring interferometry,” Meas. Sci. Technol. 4, 907–926 (1993). [CrossRef]
  2. L. Howard, J. Stone, J. Fu, “Real-time displacement measurements with a Fabry-Perot cavity and a diode laser,” Precis. Eng. 25, 321–335 (2001). [CrossRef]
  3. H. V. Parks, J. E. Faller, D. S. Robertson, “A suspended laser interferometer for determining the Newtonian constant of gravitation,” IEEE Trans. Instrum. Meas. 50, 598–600 (2001). [CrossRef]
  4. W.-T. Ni, D.-K. Liu, T.-T. Liu, H.-H. Mei, S. Shi Pan, C.-P. Pang, H.-C. Yeh, “The application of laser metrology and resonant optical cavity techniques to the measurement of G,” Meas. Sci. Technol. 10, 495–498 (1999). [CrossRef]
  5. R. D. Deslattes, A. Henins, “X-ray to visible wavelength ratios,” Phys. Rev. Lett. 31, 972–975 (1973). [CrossRef]
  6. Z. Bay, “The use of microwave modulation of lasers for length measurements,” Natl. Bur. Stand. (U.S.) Spec. Publ. 343, 59–62 (1971).
  7. T. J. Dunn, T.-M. Lee, K. Jain, “Absolute distance measurement interferometry for alignment systems for advanced lithography tools,” J. Vac. Sci. Technol. B 14, 3960–3963 (1996). [CrossRef]
  8. R. Drever, J. Hall, F. Kowalski, J. Hough, G. Ford, A. Munley, H. Ward, “Laser phase and frequency stabilization using an optical resonator,” Appl. Phys. B: Photophys. Laser Chem. B31, 97–105 (1983). [CrossRef]
  9. E. D. Black, “An introduction to Pound-Drever-Hall laser frequency stabilization,” Am. J. Phys. 69, 79–87 (2001). [CrossRef]
  10. J. Lawall, J. M. Pedulla, Y. L. Coq, “Ultrastable laser array at 633 nm for real-time dimensional metrology,” Rev. Sci. Instrum. 72, 2879–2888 (2001). [CrossRef]
  11. JDS Uniphase Corporation, Model 1007P, http://www.jdsu.com. Certain commercial equipment, instru- ments, or materials are identified in this paper to specify the experimental procedure adequately. Such identification is not intended to imply recommendation or endorsement by the National Institute of Standards and Technology, nor is it intended to imply that the materials or equipment identified are necessarily the best available for the purpose.
  12. Gooch and Housego, Model FS040-2E, http://www. goochandhousego.com.
  13. Isomet, Model 1250C, http://www.isomet.com.
  14. Conoptics Inc., Model 380/4, http://www.conoptics.com.
  15. Perkin-Elmer Inc., Model 7280, http://www.signalrecovery.com.
  16. New Focus Inc., Model 8883, http://www.newfocus.com.
  17. A. Siegman, Lasers (University Science, 1986).
  18. Burleigh Corporation, Model TSE-150V, http://www.exfo.com/en/burleigh.asp.
  19. J. Lawall, E. Kessler, “Design and evaluation of a simple ultralow vibration vacuum environment,” Rev. Sci. Instrum. 73, 209–215 (2002). [CrossRef]
  20. H. Kogelnik, T. Li, “Laser beams and resonators,” Proc. IEEE 54, 1312–1329 (1966). [CrossRef]
  21. H. A. Macleod, Thin-Film Optical Filters (Institute of Physics, 2001). [CrossRef]
  22. The author is preparing a manuscript to be called “Accurate determination of radii of curvature using Fabry-Pérot interferometry.”
  23. J. Lawall, “Interferometry for accurate displacement metrology,” Opt. Photonics News 15, 40–46 (2004). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited