The spectroscopic ellipsometry of lamellar gratings made of lossless dielectric materials is studied numerically by using the rigorous coupled-wave method with the use of Li’s Fourier factorization rules [ J. Opt. Soc. Am. A 13, 1870 ( 1996)], which are known to improve the convergence on the analyses of metallic gratings. Numerical results show that the calculation method also provides fast convergence on lossless gratings, and accurate values of the ellipsometric angles are obtained in very short computation times. Moreover, estimation of grating parameters is investigated by using a cost function defined by the average distance on the Poincaré sphere, and it is shown that the computation required for accurate estimation is possible in reasonable computation time.
© 2005 Optical Society of America
Original Manuscript: June 24, 2004
Revised Manuscript: October 21, 2004
Manuscript Accepted: October 21, 2004
Published: April 1, 2005
Koki Watanabe, Jaromı́r Pištora, Jaroslav Vlček, Martin Foldyna, and Kamil Postava, "Numerical study on the spectroscopic ellipsometry of lamellar gratings made of lossless dielectric materials," J. Opt. Soc. Am. A 22, 745-751 (2005)