A novel iterative algorithm for subaperture stitching interferometry for general surfaces is presented. It is based on the alternating optimization technique and the successive linearization method. The computer-aided-design model of the tested surface is used to determine the overlapping region precisely. Subapertures are simultaneously stitched by minimizing deviations among them as well as deviations from the nominal surface. Precise prior knowledge of the six degrees-of-freedom nulling and alignment motion is no longer required.
© 2005 Optical Society of America
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(220.4840) Optical design and fabrication : Testing
Shanyong Chen, Shengyi Li, and Yifan Dai, "Iterative algorithm for subaperture stitching interferometry for general surfaces," J. Opt. Soc. Am. A 22, 1929-1936 (2005)