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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Stephen A. Burns
  • Vol. 23, Iss. 1 — Jan. 1, 2006
  • pp: 155–165

Multilayer resonant subwavelength gratings: effects of waveguide modes and real groove profiles

Leonid I. Goray, Ivan G. Kuznetsov, Sergey Yu. Sadov, and David A. Content  »View Author Affiliations


JOSA A, Vol. 23, Issue 1, pp. 155-165 (2006)
http://dx.doi.org/10.1364/JOSAA.23.000155


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Abstract

The boundary integral equation code PCGrate-S(X) is used to analyze diffraction on Hubble Space Telescope Cosmic Origins Spectrograph gratings at different boundary shapes and layer thicknesses. An effect of resonance anomalies excited in nonconformal dielectric layers overcoated on the surface of metallic grating on the efficiency is studied for the first time to our knowledge. Refractive indices (RIs) for bulk Mg F 2 taken from well-known references are found to be not suitable for thin optical layers at wavelengths between 115 and 170 nm . A method based on scale fitting of calculated and measured grating efficiencies is outlined for derivation of thin-film optical constants at hard to measure wavelengths. The calculated efficiency based on real boundary profiles and derived RIs of the G185M subwavelength grating is shown to fit within 9.6% or better to the measured data.

© 2006 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(050.1960) Diffraction and gratings : Diffraction theory
(260.2110) Physical optics : Electromagnetic optics
(260.7190) Physical optics : Ultraviolet
(310.2790) Thin films : Guided waves
(310.6860) Thin films : Thin films, optical properties

ToC Category:
DIFFRACTIVE OPTICS AND MICRO-OPTICS

Citation
Leonid I. Goray, Ivan G. Kuznetsov, Sergey Yu. Sadov, and David A. Content, "Multilayer resonant subwavelength gratings: effects of waveguide modes and real groove profiles," J. Opt. Soc. Am. A 23, 155-165 (2006)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-1-155


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