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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Editor: Stephen A. Burns
  • Vol. 23, Iss. 10 — Oct. 1, 2006
  • pp: 2639–2644

Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry

Denis Pristinski, Veronika Kozlovskaya, and Svetlana A. Sukhishvili  »View Author Affiliations

JOSA A, Vol. 23, Issue 10, pp. 2639-2644 (2006)

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Ellipsometry is often used to determine the refractive index and/or the thickness of a polymer layer on a substrate. However, simultaneous determination of these parameters from a single-wavelength single-angle measurement is not always possible. The present study determines the sensitivity of the method to errors of measurement for the case of phase modulated ellipsometry and identifies conditions for decoupling film thickness and refractive index. For a specific range of film thickness, both the thickness and the refractive index can be determined from a single measurement with high precision. This optimal range of the film thickness is determined for organic thin films, and the analysis is tested on hydrogel-like polymer films in air and in water.

© 2006 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(240.0310) Optics at surfaces : Thin films
(310.3840) Thin films : Materials and process characterization

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: May 20, 2005
Revised Manuscript: January 20, 2006
Manuscript Accepted: April 12, 2006

Denis Pristinski, Veronika Kozlovskaya, and Svetlana A. Sukhishvili, "Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry," J. Opt. Soc. Am. A 23, 2639-2644 (2006)

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