OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Stephen A. Burns
  • Vol. 23, Iss. 10 — Oct. 1, 2006
  • pp: 2639–2644

Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry

Denis Pristinski, Veronika Kozlovskaya, and Svetlana A. Sukhishvili  »View Author Affiliations


JOSA A, Vol. 23, Issue 10, pp. 2639-2644 (2006)
http://dx.doi.org/10.1364/JOSAA.23.002639


View Full Text Article

Acrobat PDF (191 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Ellipsometry is often used to determine the refractive index and/or the thickness of a polymer layer on a substrate. However, simultaneous determination of these parameters from a single-wavelength single-angle measurement is not always possible. The present study determines the sensitivity of the method to errors of measurement for the case of phase modulated ellipsometry and identifies conditions for decoupling film thickness and refractive index. For a specific range of film thickness, both the thickness and the refractive index can be determined from a single measurement with high precision. This optimal range of the film thickness is determined for organic thin films, and the analysis is tested on hydrogel-like polymer films in air and in water.

© 2006 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(240.0310) Optics at surfaces : Thin films
(310.3840) Thin films : Materials and process characterization

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: May 20, 2005
Revised Manuscript: January 20, 2006
Manuscript Accepted: April 12, 2006

Citation
Denis Pristinski, Veronika Kozlovskaya, and Svetlana A. Sukhishvili, "Determination of film thickness and refractive index in one measurement of phase-modulated ellipsometry," J. Opt. Soc. Am. A 23, 2639-2644 (2006)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-10-2639

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited