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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Stephen A. Burns
  • Vol. 23, Iss. 11 — Nov. 1, 2006
  • pp: 2810–2816

Extended bidirectional reflectance distribution function for polarized light scattering from subsurface defects under a smooth surface

Jian Shen, Degang Deng, Weijin Kong, Shijie Liu, Zicai Shen, Chaoyang Wei, Hongbo He, Jianda Shao, and Zhengxiu Fan  »View Author Affiliations


JOSA A, Vol. 23, Issue 11, pp. 2810-2816 (2006)
http://dx.doi.org/10.1364/JOSAA.23.002810


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Abstract

By introducing the scattering probability of a subsurface defect (SSD) and statistical distribution functions of SSD radius, refractive index, and position, we derive an extended bidirectional reflectance distribution function (BRDF) from the Jones scattering matrix. This function is applicable to the calculation for comparison with measurement of polarized light-scattering resulting from a SSD. A numerical calculation of the extended BRDF for the case of p-polarized incident light was performed by means of the Monte Carlo method. Our numerical results indicate that the extended BRDF strongly depends on the light incidence angle, the light scattering angle, and the out-of-plane azimuth angle. We observe a 180 ° symmetry with respect to the azimuth angle. We further investigate the influence of the SSD density, the substrate refractive index, and the statistical distributions of the SSD radius and refractive index on the extended BRDF. For transparent substrates, we also find the dependence of the extended BRDF on the SSD positions.

© 2006 Optical Society of America

OCIS Codes
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(260.2130) Physical optics : Ellipsometry and polarimetry
(290.5820) Scattering : Scattering measurements
(290.5850) Scattering : Scattering, particles

ToC Category:
Scattering

History
Original Manuscript: July 8, 2005
Revised Manuscript: June 14, 2006
Manuscript Accepted: June 22, 2006

Citation
Jian Shen, Degang Deng, Weijin Kong, Shijie Liu, Zicai Shen, Chaoyang Wei, Hongbo He, Jianda Shao, and Zhengxiu Fan, "Extended bidirectional reflectance distribution function for polarized light scattering from subsurface defects under a smooth surface," J. Opt. Soc. Am. A 23, 2810-2816 (2006)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-11-2810


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