Extended bidirectional reflectance distribution function for polarized light scattering from subsurface defects under a smooth surface
JOSA A, Vol. 23, Issue 11, pp. 2810-2816 (2006)
http://dx.doi.org/10.1364/JOSAA.23.002810
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Abstract
By introducing the scattering probability of a subsurface defect (SSD) and statistical distribution functions of SSD radius, refractive index, and position, we derive an extended bidirectional reflectance distribution function (BRDF) from the Jones scattering matrix. This function is applicable to the calculation for comparison with measurement of polarized light-scattering resulting from a SSD. A numerical calculation of the extended BRDF for the case of p-polarized incident light was performed by means of the Monte Carlo method. Our numerical results indicate that the extended BRDF strongly depends on the light incidence angle, the light scattering angle, and the out-of-plane azimuth angle. We observe a
© 2006 Optical Society of America
OCIS Codes
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(260.2130) Physical optics : Ellipsometry and polarimetry
(290.5820) Scattering : Scattering measurements
(290.5850) Scattering : Scattering, particles
ToC Category:
Scattering
History
Original Manuscript: July 8, 2005
Revised Manuscript: June 14, 2006
Manuscript Accepted: June 22, 2006
Citation
Jian Shen, Degang Deng, Weijin Kong, Shijie Liu, Zicai Shen, Chaoyang Wei, Hongbo He, Jianda Shao, and Zhengxiu Fan, "Extended bidirectional reflectance distribution function for polarized light scattering from subsurface defects under a smooth surface," J. Opt. Soc. Am. A 23, 2810-2816 (2006)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-11-2810
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