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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Stephen A. Burns
  • Vol. 23, Iss. 2 — Feb. 1, 2006
  • pp: 468–475

Pseudodielectric functions of uniaxial materials in certain symmetry directions

G. E. Jellison, Jr. and J. S. Baba  »View Author Affiliations


JOSA A, Vol. 23, Issue 2, pp. 468-475 (2006)
http://dx.doi.org/10.1364/JOSAA.23.000468


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Abstract

The pseudodielectric function is often used to represent ellipsometric data and corresponds to the actual dielectric functions of materials when there is no surface overlayer and the material is isotropic. If a uniaxial material is oriented such that the optic axis is in the plane of incidence or is perpendicular to the plane of incidence, then the cross-polarization terms are zero and appropriate pseudodielectric functions can be determined from the ellipsometry data. We calculate the pseudodielectric functions for uniaxial crystals in three primary symmetry directions: (1) the optic axis is perpendicular to the plane of incidence, (2) the optic axis is in the plane of the sample surface and parallel to the plane of incidence, and (3) the optic axis is in the plane of the sample surface and perpendicular to the plane of incidence. These results are expanded in terms of the difference in the ordinary and extraordinary dielectric functions and compared with the approximation of Aspnes [J. Opt. Soc. Am. 70, 1275 (1980)] . Comparisons are made with experimental results on oriented crystals of rutile ( TiO 2 ) , and a simple procedure is presented to determine the complex dielectric function from standard ellipsometry techniques.

© 2006 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(160.1190) Materials : Anisotropic optical materials
(260.2130) Physical optics : Ellipsometry and polarimetry

ToC Category:
Physical Optics

History
Original Manuscript: April 28, 2005
Revised Manuscript: June 28, 2005
Manuscript Accepted: July 8, 2005

Citation
G. E. Jellison, Jr. and J. S. Baba, "Pseudodielectric functions of uniaxial materials in certain symmetry directions," J. Opt. Soc. Am. A 23, 468-475 (2006)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-2-468


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References

  1. D. E. Aspnes, "Approximate solution of ellipsometric equations for optically biaxial crystals," J. Opt. Soc. Am. 70, 1275-1277 (1980). [CrossRef] [PubMed]
  2. V. V. Filippov, A. Yu. Tronin, and A. F. Konstantinova, "Ellipsometry of anisotropic media," Crystallogr. Rep. 39, 313-335 (1994).
  3. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, 1977).
  4. J. Lekner, "Reflection ellipsometry of uniaxial crystals," J. Opt. Soc. Am. A 14, 1359-1362 (1997). [CrossRef]
  5. J. Lekner, "Reflection and refraction by uniaxial crystals," J. Phys.: Condens. Matter 3, 6121-6133 (1991). [CrossRef]
  6. G. E. Jellison, Jr., F. A. Modine, and L. A. Boatner, "Measurement of the optical functions of uniaxial materials by two-modulator generalized ellipsometry: rutile (TiO2)," Opt. Lett. 22, 1808-1810 (1997). [CrossRef]
  7. G. E. Jellison, Jr., L. A. Boatner, J. D. Budai, B. S. Jeong, and D. P. Norton, "Spectroscopic ellipsometry of thin film and bulk anatase (TiO2)," J. Appl. Phys. 93, 9537-9541 (2003). [CrossRef]
  8. M. Schubert, B. Rheinlander, J. A. Woollam, B. Johs, and C. M. Herzinger, "Extension of rotating-analyzer ellipsometry to generalized ellipsometry: determination of the dielectric function tensor from uniaxial TiO2," J. Opt. Soc. Am. A 13, 875-883 (1996). [CrossRef]
  9. T. E. Tiwald and M. Schubert, "Measurement of rutile TiO2 dielectric tensor from 0.148 to 33 µm using generalized ellipsometry," in Proc. SPIE 4103, 19-29 (2000). [CrossRef]
  10. G. E. Jellison, Jr., and F. A. Modine, "Two-modulator generalized ellipsometry: experiment and calibration," Appl. Opt. 36, 8184-8189 (1997). [CrossRef]
  11. G. E. Jellison, Jr., and F. A. Modine, "Two-modulator generalized ellipsometry: theory," Appl. Opt. 36, 8190-8198 (1997). [CrossRef]
  12. G. E. Jellison, Jr., "Spectroscopic ellipsometry data analysis: measured versus calculated quantities," Thin Solid Films 313-314, 33-39 (1998). [CrossRef]
  13. G. E. Jellison, Jr., "Data analysis for spectroscopic ellipsometry," Thin Solid Films 234, 416-422 (1993). [CrossRef]
  14. D. A. G. Bruggeman, "Berechnung verschiedener physikalischer Konstanten von heterogenen Substanzen," Ann. Phys. (Leipzig) 24, 636-679 (1935).

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