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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Stephen A. Burns
  • Vol. 23, Iss. 3 — Mar. 1, 2006
  • pp: 638–645

Efficient finite-element, Green’s function approach for critical-dimension metrology of three-dimensional gratings on multilayer films

Yia-Chung Chang, Guangwei Li, Hanyou Chu, and Jon Opsal  »View Author Affiliations


JOSA A, Vol. 23, Issue 3, pp. 638-645 (2006)
http://dx.doi.org/10.1364/JOSAA.23.000638


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Abstract

We present an efficient method for calculating the reflectivity of three-dimensional gratings on multilayer films based on a finite-element, Green’s function approach. Our method scales as N log N , where N is the number of plane waves used in the expansion. Therefore, it is much more efficient than the commonly adopted rigorous-coupled-wave analysis (RCWA), which scales as N 3 . We demonstrate the effectiveness of this method by applying it to a two-dimensional periodic array of contact holes on a multilayer film. We find that our Green’s function approach is about one order of magnitude faster than the RCWA approach when applied to typical contact holes considered in industry. For most cases, this method is efficient enough for application as a real-time, critical-dimension metrology tool.

© 2006 Optical Society of America

OCIS Codes
(050.1960) Diffraction and gratings : Diffraction theory
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3940) Instrumentation, measurement, and metrology : Metrology

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: May 17, 2005
Revised Manuscript: July 30, 2005
Manuscript Accepted: August 10, 2005

Citation
Yia-Chung Chang, Guangwei Li, Hanyou Chu, and Jon Opsal, "Efficient finite-element, Green's function approach for critical-dimension metrology of three-dimensional gratings on multilayer films," J. Opt. Soc. Am. A 23, 638-645 (2006)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-3-638


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References

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