OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Stephen A. Burns
  • Vol. 23, Iss. 5 — May. 1, 2006
  • pp: 1074–1081

Modeling, simulation, and open-loop control of a continuous facesheet MEMS deformable mirror

Curtis R. Vogel and Qiang Yang  »View Author Affiliations


JOSA A, Vol. 23, Issue 5, pp. 1074-1081 (2006)
http://dx.doi.org/10.1364/JOSAA.23.001074


View Full Text Article

Enhanced HTML    Acrobat PDF (354 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We introduce a coupled system of nonlinear partial differential equations (PDEs) to model a particular microelectromechanical systems (MEMS) deformable mirror consisting of a continuous facesheet coupled with electrostatic plate-driven actuators. To make the problem computationally tractable, we reduced the system to a single linear PDE for the facesheet coupled with nonlinear algebraic constraints for each of the actuators. We also introduce a nonlinearly constrained quadratic optimization problem for open-loop control of the MEMS mirror. Numerical simulation and control results are presented, and shortcomings of the model are discussed.

© 2006 Optical Society of America

OCIS Codes
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(230.3990) Optical devices : Micro-optical devices
(230.4040) Optical devices : Mirrors

ToC Category:
Atmospheric and ocean optics

History
Original Manuscript: August 3, 2005
Manuscript Accepted: October 26, 2005

Citation
Curtis R. Vogel and Qiang Yang, "Modeling, simulation, and open-loop control of a continuous facesheet MEMS deformable mirror," J. Opt. Soc. Am. A 23, 1074-1081 (2006)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-5-1074

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited