We introduce a coupled system of nonlinear partial differential equations (PDEs) to model a particular microelectromechanical systems (MEMS) deformable mirror consisting of a continuous facesheet coupled with electrostatic plate-driven actuators. To make the problem computationally tractable, we reduced the system to a single linear PDE for the facesheet coupled with nonlinear algebraic constraints for each of the actuators. We also introduce a nonlinearly constrained quadratic optimization problem for open-loop control of the MEMS mirror. Numerical simulation and control results are presented, and shortcomings of the model are discussed.
© 2006 Optical Society of America
Atmospheric and ocean optics
Original Manuscript: August 3, 2005
Manuscript Accepted: October 26, 2005
Curtis R. Vogel and Qiang Yang, "Modeling, simulation, and open-loop control of a continuous facesheet MEMS deformable mirror," J. Opt. Soc. Am. A 23, 1074-1081 (2006)