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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Stephen A. Burns
  • Vol. 23, Iss. 5 — May. 1, 2006
  • pp: 1074–1081

Modeling, simulation, and open-loop control of a continuous facesheet MEMS deformable mirror

Curtis R. Vogel and Qiang Yang  »View Author Affiliations


JOSA A, Vol. 23, Issue 5, pp. 1074-1081 (2006)
http://dx.doi.org/10.1364/JOSAA.23.001074


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Abstract

We introduce a coupled system of nonlinear partial differential equations (PDEs) to model a particular microelectromechanical systems (MEMS) deformable mirror consisting of a continuous facesheet coupled with electrostatic plate-driven actuators. To make the problem computationally tractable, we reduced the system to a single linear PDE for the facesheet coupled with nonlinear algebraic constraints for each of the actuators. We also introduce a nonlinearly constrained quadratic optimization problem for open-loop control of the MEMS mirror. Numerical simulation and control results are presented, and shortcomings of the model are discussed.

© 2006 Optical Society of America

OCIS Codes
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(230.3990) Optical devices : Micro-optical devices
(230.4040) Optical devices : Mirrors

ToC Category:
Atmospheric and ocean optics

History
Original Manuscript: August 3, 2005
Manuscript Accepted: October 26, 2005

Citation
Curtis R. Vogel and Qiang Yang, "Modeling, simulation, and open-loop control of a continuous facesheet MEMS deformable mirror," J. Opt. Soc. Am. A 23, 1074-1081 (2006)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-23-5-1074


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