Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Absorbance-modulation optical lithography

Not Accessible

Your library or personal account may give you access

Abstract

We describe a new mode of optical lithography called absorbance-modulation optical lithography (AMOL) in which a thin film of photochromic material is placed on top of a conventional photoresist and illuminated simultaneously by a focal spot of wavelength λ1 and a ring-shaped illumination of wavelength λ2. The λ1 radiation converts the photochromic material from an opaque to a transparent configuration, thereby enabling exposure of the photoresist, while the λ2 radiation reverses the transformation. As a result of these competing effects, the point-spread function that exposes the resist is strongly compressed, resulting in higher photolithographic resolution and information density. We show by modeling that the point-spread-function compression achieved via AMOL depends only on the absorbance distribution in the photostationary state. In this respect, absorbance modulation represents an optical nonlinearity that depends on the intensity ratio of λ1 and λ2 and not on the absolute intensity of either one alone. By inserting material parameters into the model, a lithographic resolution corresponding to λ113 is predicted.

© 2006 Optical Society of America

Full Article  |  PDF Article
More Like This
Barrier-free absorbance modulation for super-resolution optical lithography

Apratim Majumder, Farhana Masid, Benjamin Pollock, Trisha L. Andrew, and Rajesh Menon
Opt. Express 23(9) 12244-12250 (2015)

Performance enhancements to absorbance-modulation optical lithography. I. Plasmonic reflector layers

John E. Foulkes and Richard J. Blaikie
J. Opt. Soc. Am. A 28(11) 2209-2217 (2011)

Performance enhancements to absorbance-modulation optical lithography. II. Plasmonic superlenses

John E. Foulkes and Richard J. Blaikie
J. Opt. Soc. Am. A 28(11) 2218-2225 (2011)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (10)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved