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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Editor: Stephen A. Burns
  • Vol. 24, Iss. 12 — Dec. 1, 2007
  • pp: 3827–3833

Open-loop control of a MEMS deformable mirror for large-amplitude wavefront control

Jason B. Stewart, Alioune Diouf, Yaopeng Zhou, and Thomas G. Bifano  »View Author Affiliations

JOSA A, Vol. 24, Issue 12, pp. 3827-3833 (2007)

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A method is introduced for predicting control voltages that will generate a prescribed surface shape on a MEMS deformable mirror. The algorithm is based upon an analytical elastic model of the mirror membrane and an empirical electromechanical model of its actuators. It is computationally simple and inherently fast. Shapes at the limit of achievable mirror spatial frequencies with up to 1.5 μ m amplitudes have been achieved with less than 15 nm rms error.

© 2007 Optical Society of America

OCIS Codes
(000.2170) General : Equipment and techniques
(010.1080) Atmospheric and oceanic optics : Active or adaptive optics
(110.6770) Imaging systems : Telescopes
(170.4460) Medical optics and biotechnology : Ophthalmic optics and devices
(230.4040) Optical devices : Mirrors
(230.6120) Optical devices : Spatial light modulators

ToC Category:
Atmospheric Optics

Original Manuscript: July 12, 2007
Revised Manuscript: September 19, 2007
Manuscript Accepted: October 4, 2007
Published: November 29, 2007

Virtual Issues
Vol. 3, Iss. 1 Virtual Journal for Biomedical Optics

Jason B. Stewart, Alioune Diouf, Yaopeng Zhou, and Thomas G. Bifano, "Open-loop control of a MEMS deformable mirror for large-amplitude wavefront control," J. Opt. Soc. Am. A 24, 3827-3833 (2007)

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