Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Effect of line and trench profile variation on specular and diffuse reflectance from a periodic structure

Not Accessible

Your library or personal account may give you access

Abstract

I model variations in the profile of a silicon grating consisting of parallel lines or trenches by calculating the reflectance of a superstructure in which the profiles are randomly modulated about the nominal profile. I vary the edge positions, the edge profiles, the line heights, and the trench depths and find that the Stokes reflectance can be modified from its nominal value by a relatively large amount, especially in the case of linewidth variations. I find that the reflected field can be approximated by the mean field reflected by a distribution of periodic gratings and that the field does not represent the field from the average profile. In fitting results to more than one modeled parameter, the changes that are observed can be enough to shift the deduced parameter in some cases by more than the rms variation of that parameter. The diffuse reflectance (the nonspecular diffraction efficiency) is found to increase with the variance of the fluctuations.

© 2007 Optical Society of America

Full Article  |  PDF Article
More Like This
Effective medium approximations for modeling optical reflectance from gratings with rough edges

Brent C. Bergner, Thomas A. Germer, and Thomas J. Suleski
J. Opt. Soc. Am. A 27(5) 1083-1090 (2010)

Modeling of line roughness and its impact on the diffraction intensities and the reconstructed critical dimensions in scatterometry

H. Gross, M.-A. Henn, S. Heidenreich, A. Rathsfeld, and M. Bär
Appl. Opt. 51(30) 7384-7394 (2012)

Effect of line roughness on the diffraction intensities in angular resolved scatterometry

Akiko Kato and Frank Scholze
Appl. Opt. 49(31) 6102-6110 (2010)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (10)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved