Abstract

An extended and refined scattering-matrix method is proposed for the efficient full parallel implementation of rigorous coupled-wave analysis of multilayer structures. The total electromagnetic field distribution in the rigorous coupled-wave analysis is represented by the linear combination of the eigenmodes with their own coupling coefficients. In the proposed scheme, a refined recursion relation of the coupling coefficients of the eigenmodes is defined for complete parallel computation of the electromagnetic field distributions within multilayer structures.

© 2007 Optical Society of America

Pseudo-Fourier modal analysis of two-dimensional arbitrarily shaped grating structures

Hwi Kim and Byoungho Lee
J. Opt. Soc. Am. A 25(1) 40-54 (2008)

Mathematical modeling of crossed nanophotonic structures with generalized scattering-matrix method and local Fourier modal analysis

Hwi Kim and Byoungho Lee
J. Opt. Soc. Am. B 25(4) 518-544 (2008)

Stable implementation of the rigorous coupled-wave analysis for surface-relief gratings: enhanced transmittance matrix approach

M. G. Moharam, Drew A. Pommet, Eric B. Grann, and T. K. Gaylord
J. Opt. Soc. Am. A 12(5) 1077-1086 (1995)

Efficient implementation of rigorous coupled-wave analysis for surface-relief gratings

Song Peng and G. Michael Morris
J. Opt. Soc. Am. A 12(5) 1087-1096 (1995)

Formulation for stable and efficient implementation of the rigorous coupled-wave analysis of binary gratings

M. G. Moharam, Eric B. Grann, Drew A. Pommet, and T. K. Gaylord
J. Opt. Soc. Am. A 12(5) 1068-1076 (1995)