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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 25, Iss. 12 — Dec. 1, 2008
  • pp: 2945–2951

Quasi-Talbot effect of the high-density grating in near field

Shuyun Teng, Yugui Tan, and Chuanfu Cheng  »View Author Affiliations


JOSA A, Vol. 25, Issue 12, pp. 2945-2951 (2008)
http://dx.doi.org/10.1364/JOSAA.25.002945


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Abstract

On the basis of the finite-difference time-domain technique, the diffraction of the high-density grating in the near field is developed, and the gray-scale pattern of the diffraction intensity distribution of a one-dimensional grating is presented. A detailed analysis shows that the near-field diffraction of the grating is the result of the diffraction of a single slit, the interference of two evanescent waves from neighboring slits, and the interference of the homogeneous waves from the slits. Through many numerical calculations, the condition for obtaining the quasi-Talbot imaging of the grating in the near field is explored, i.e., the period of the grating d is larger than the incident wavelength λ but smaller than 4 λ . The influence of the opening ratio of the grating on the quasi-Talbot imaging of the grating in the near field is also discussed. This study of the near-field diffraction of the high-density grating may be helpful for understanding the diffraction characteristics of subwavelength structures, and the quasi-Talbot imaging of the high-density grating will contribute to the application of the grating in near-field photolithography.

© 2008 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(070.6760) Fourier optics and signal processing : Talbot and self-imaging effects
(230.1950) Optical devices : Diffraction gratings
(260.2110) Physical optics : Electromagnetic optics

ToC Category:
Diffraction and Gratings

History
Original Manuscript: August 6, 2008
Manuscript Accepted: September 5, 2008
Published: November 10, 2008

Citation
Shuyun Teng, Yugui Tan, and Chuanfu Cheng, "Quasi-Talbot effect of the high-density grating in near field," J. Opt. Soc. Am. A 25, 2945-2951 (2008)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-25-12-2945

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