OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 25, Iss. 12 — Dec. 1, 2008
  • pp: 3013–3020

Large step-height measurements using multiple-wavelength holographic interferometry with tunable laser diodes

Atsushi Wada, Makoto Kato, and Yukihiro Ishii  »View Author Affiliations


JOSA A, Vol. 25, Issue 12, pp. 3013-3020 (2008)
http://dx.doi.org/10.1364/JOSAA.25.003013


View Full Text Article

Enhanced HTML    Acrobat PDF (1076 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Accurate measurement of large step heights using multiple-wavelength holographic interferometry is realized using laser diodes. Due to the high-resolution wavelength tunability of such lasers, a pair of holograms with a wavelength difference of less than 0.01 nm is recorded and used to extract a phase difference having a large synthetic wavelength. Phase differences with synthetic wavelengths ranging from 2.5 to 73 mm are extracted by using pairs of holograms with wavelength differences between 0.3 and 0.01 nm . By combining the phase differences, measurements with a step height of 18 mm and an rms error of 0.04 mm could be achieved. The requirements for performing the phase unwrapping are discussed. Precise knowledge of the recording wavelengths is required to correctly perform this unwrapping.

© 2008 Optical Society of America

OCIS Codes
(090.2880) Holography : Holographic interferometry
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.2880) Instrumentation, measurement, and metrology : Holographic interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(140.2020) Lasers and laser optics : Diode lasers
(090.1995) Holography : Digital holography

ToC Category:
Holography

History
Original Manuscript: April 4, 2008
Revised Manuscript: September 28, 2008
Manuscript Accepted: September 28, 2008
Published: November 19, 2008

Citation
Atsushi Wada, Makoto Kato, and Yukihiro Ishii, "Large step-height measurements using multiple-wavelength holographic interferometry with tunable laser diodes," J. Opt. Soc. Am. A 25, 3013-3020 (2008)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-25-12-3013

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited