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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Editor: Stephen A. Burns
  • Vol. 25, Iss. 7 — Jul. 1, 2008
  • pp: 1722–1727

Reconstruction of a one-dimensional surface from inverse transmission

Anting Wang, T. A. Leskova, A. A. Maradudin, and Zu-Han Gu  »View Author Affiliations

JOSA A, Vol. 25, Issue 7, pp. 1722-1727 (2008)

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An optimization algorithm for the reconstruction of a surface profile is presented. This algorithm uses the far-field transmitted intensity to retrieve the surface profile of a thin film. We approach the inverse transmission problem as a constrained optimization problem. A mathematical representation of the surface based on B-spline curves and an optimum profile search with the self-adaptation evolutionary strategy (ES) are adopted. As the input data for the ES algorithm for surface inversion, the transmitted intensity has been measured by both a laser bidirectional reflectometer instrument and an in-line digital speckle camera system. The reconstructed 1D surfaces are compared with the profile measured by an atomic force microscope.

© 2008 Optical Society of America

OCIS Codes
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(120.7000) Instrumentation, measurement, and metrology : Transmission
(290.3200) Scattering : Inverse scattering
(310.0310) Thin films : Thin films

ToC Category:

Original Manuscript: October 31, 2007
Revised Manuscript: April 26, 2008
Manuscript Accepted: May 4, 2008
Published: June 25, 2008

Anting Wang, T. A. Leskova, A. A. Maradudin, and Zu-Han Gu, "Reconstruction of a one-dimensional surface from inverse transmission," J. Opt. Soc. Am. A 25, 1722-1727 (2008)

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