OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Stephen A. Burns
  • Vol. 25, Iss. 7 — Jul. 1, 2008
  • pp: 1722–1727

Reconstruction of a one-dimensional surface from inverse transmission

Anting Wang, T. A. Leskova, A. A. Maradudin, and Zu-Han Gu  »View Author Affiliations


JOSA A, Vol. 25, Issue 7, pp. 1722-1727 (2008)
http://dx.doi.org/10.1364/JOSAA.25.001722


View Full Text Article

Enhanced HTML    Acrobat PDF (551 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

An optimization algorithm for the reconstruction of a surface profile is presented. This algorithm uses the far-field transmitted intensity to retrieve the surface profile of a thin film. We approach the inverse transmission problem as a constrained optimization problem. A mathematical representation of the surface based on B-spline curves and an optimum profile search with the self-adaptation evolutionary strategy (ES) are adopted. As the input data for the ES algorithm for surface inversion, the transmitted intensity has been measured by both a laser bidirectional reflectometer instrument and an in-line digital speckle camera system. The reconstructed 1D surfaces are compared with the profile measured by an atomic force microscope.

© 2008 Optical Society of America

OCIS Codes
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(120.7000) Instrumentation, measurement, and metrology : Transmission
(290.3200) Scattering : Inverse scattering
(310.0310) Thin films : Thin films

ToC Category:
Scattering

History
Original Manuscript: October 31, 2007
Revised Manuscript: April 26, 2008
Manuscript Accepted: May 4, 2008
Published: June 25, 2008

Citation
Anting Wang, T. A. Leskova, A. A. Maradudin, and Zu-Han Gu, "Reconstruction of a one-dimensional surface from inverse transmission," J. Opt. Soc. Am. A 25, 1722-1727 (2008)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-25-7-1722


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. A. J. Sant, J. C. Dainty, and M. J. Kim, “Comparison of surface scattering between identical randomly rough metal and dielectric diffuser,” Opt. Lett. 14, 1183-1185 (1989). [CrossRef] [PubMed]
  2. A. A. Maradudin, T. Michel, A. R. McGurn, and E. R. Mendez, “Enhanced backscattering of light from a random grating,” Ann. Phys. (N.Y.) 203, 255-307 (1990). [CrossRef]
  3. Z.-H. Gu, J. Q. Lu, and M. M. Tehrani, “Enhanced backscattering of polarized light at vacuum/dielectric interface,” Opt. Eng. (Bellingham) 34, 1611-1623 (1995). [CrossRef]
  4. W. T. Welford, “Optical estimation of statistics of surface roughness from light scattering measurements,” Opt. Quantum Electron. 9, 269-287 (1977). [CrossRef]
  5. J. M. Elson and J. M. Bennett, “Relation between the angular dependence of scattering and the statistical properties of optical surfaces,” J. Opt. Soc. Am. 69, 31-47 (1979). [CrossRef]
  6. J. C. Stover, S. A. Serati, and C. H. Guillespie, “Calculation of surface statistics from light scatter,” Opt. Eng. (Bellingham) 23, 406-412 (1984).
  7. V. Malyshkin, S. Simeonov, A. R. McGurn, and A. A. Maradudin, “Determination of surface profile statistics from electromagnetic scattering data,” Opt. Lett. 22, 58-60 (1997). [CrossRef] [PubMed]
  8. D. Macías, G. Olague, and E. R. Méndez, “Surface profile reconstruction from scattered intensity data using evolutionary strategies,” in EvoWorkshops 2002, Vol. 2279 of Lecture Notes in Computer Science (Springer, 2002), pp. 233.
  9. D. Macías, G. Olague, and E. R. Méndez, “Hybrid evolution strategy--downhill simplex algorithm for inverse light scattering problems,” in EvoWorkshops 2003, Vol. 2611 of Lecture Notes in Computer Science (Springer, 2003), pp. 399.
  10. D. Macías, G. Olague, and E. R. Méndez, “Inverse scattering with far-field intensity data: Random surfaces that belong to a well-defined statistical class,” Waves Random Complex Media 16, 545-560 (2006). [CrossRef]
  11. A. Wang and Z.-H. Gu, “Inverse scattering simulation for a 1-D surface reconstruction,” Proc. SPIE 6672, 66720E (2007). [CrossRef]
  12. T. Back, U. Hammel, and H.-P. Schwefel, “Evolutionary computation: Comments on the history and current state,” IEEE Trans. Evol. Comput. 1, 3-17 (1997). [CrossRef]
  13. B. Baumeier, T. A. Leskova, and A. A. Maradudin, “Transmission of light through a thin metal film with periodically and randomly corrugated surfaces,” J. Opt. A, Pure Appl. Opt. 8, S91-S207 (2006). [CrossRef]
  14. A. A. Maradudin, E. R. Méndez, and T. A. Leskova, Designer Surface (Elsevier, in press).
  15. Z.-H. Gu and A. Wang, “Experimental reconstruction for inverse scattering of one-dimensional surfaces,” Proc. SPIE 6672, 66720H (2007). [CrossRef]
  16. H. G. Beyer, The Theory of Evolution Strategies (Springer-Verlag, 2001), p. 380.
  17. Z.-H. Gu, “Angular spectrum redistribution from rough surface scattering,” Proc. SPIE 4447, 109-114 (2001). [CrossRef]
  18. Z.-H. Gu, I. M. Fuks, and M. Ciftan, “Grazing angle enhanced backscattering from a dielectric film on a reflecting metal substrate,” Opt. Eng. (Bellingham) 43, 559-567 (2004). [CrossRef]
  19. Z.-H. Gu and M. Josse, “Fabrication of 1-D gratings on photoresist for light-scattering and memory effect measurements,” Proc. SPIE 2726, 158-163 (1996). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited