Reconstruction of periodic structures from optical scattering measurements using adjoint equations
JOSA A, Vol. 25, Issue 8, pp. 1906-1920 (2008)
http://dx.doi.org/10.1364/JOSAA.25.001906
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Abstract
A new numerical approach to efficiently reconstruct the profile of a grating from measurements of reflection coefficients is demonstrated. The problem is posed in the mathematical framework of an inverse scattering problem and solved using gradient-based algorithms. The gradient is computed efficiently using adjoint equations, which amounts to an extra scattering computation per iteration. For symmetric profiles it is shown that only knowledge of the scattered field is sufficient to compute the gradient. As a result, complex profiles can be reconstructed rapidly, and the method can be potentially used in metrology applications in semiconductors. The technique is demonstrated for the case of TE polarization.
© 2008 Optical Society of America
OCIS Codes
(000.4430) General : Numerical approximation and analysis
(050.0050) Diffraction and gratings : Diffraction and gratings
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(290.3200) Scattering : Inverse scattering
ToC Category:
Scattering
History
Original Manuscript: August 24, 2007
Revised Manuscript: April 7, 2008
Manuscript Accepted: April 25, 2008
Published: July 8, 2008
Citation
Gonzalo R. Feijóo, "Reconstruction of periodic structures from optical scattering measurements using adjoint equations," J. Opt. Soc. Am. A 25, 1906-1920 (2008)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-25-8-1906
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