OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Stephen A. Burns
  • Vol. 25, Iss. 8 — Aug. 1, 2008
  • pp: 1906–1920

Reconstruction of periodic structures from optical scattering measurements using adjoint equations

Gonzalo R. Feijóo  »View Author Affiliations


JOSA A, Vol. 25, Issue 8, pp. 1906-1920 (2008)
http://dx.doi.org/10.1364/JOSAA.25.001906


View Full Text Article

Enhanced HTML    Acrobat PDF (1097 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A new numerical approach to efficiently reconstruct the profile of a grating from measurements of reflection coefficients is demonstrated. The problem is posed in the mathematical framework of an inverse scattering problem and solved using gradient-based algorithms. The gradient is computed efficiently using adjoint equations, which amounts to an extra scattering computation per iteration. For symmetric profiles it is shown that only knowledge of the scattered field is sufficient to compute the gradient. As a result, complex profiles can be reconstructed rapidly, and the method can be potentially used in metrology applications in semiconductors. The technique is demonstrated for the case of TE polarization.

© 2008 Optical Society of America

OCIS Codes
(000.4430) General : Numerical approximation and analysis
(050.0050) Diffraction and gratings : Diffraction and gratings
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(290.3200) Scattering : Inverse scattering

ToC Category:
Scattering

History
Original Manuscript: August 24, 2007
Revised Manuscript: April 7, 2008
Manuscript Accepted: April 25, 2008
Published: July 8, 2008

Citation
Gonzalo R. Feijóo, "Reconstruction of periodic structures from optical scattering measurements using adjoint equations," J. Opt. Soc. Am. A 25, 1906-1920 (2008)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-25-8-1906

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited