OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Editor: Stephen A. Burns
  • Vol. 26, Iss. 12 — Dec. 1, 2009
  • pp: 2526–2531

Far-field evanescent wave propagation using coupled subwavelength gratings for a MEMS sensor

Al-Aakhir A. Rogers, Scott Samson, and Sunny Kedia  »View Author Affiliations

JOSA A, Vol. 26, Issue 12, pp. 2526-2531 (2009)

View Full Text Article

Enhanced HTML    Acrobat PDF (375 KB)

Browse Journals / Lookup Meetings

Browse by Journal and Year


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools



A technique was developed to couple near-field evanescent waves into observable diffraction orders in the far-field region. This investigation was of two gratings that have a 1.0 μ m grating period in glass and 1.1 μ m in silicon and are individually subwavelength, but when coupled together yield an 11.0 μ m effective grating period. This effective grating period is not subwavelength to a 1.550 μ m infrared incident source and exhibits higher diffraction orders. Optimum evanescent wave coupling efficiency was simulated by varying the grating thickness and the grating separation between the subwavelength gratings. This proposed evanescent wave coupling concept is being investigated for use in a bulk silicon MEMS accelerometer.

© 2009 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(050.6624) Diffraction and gratings : Subwavelength structures
(070.7345) Fourier optics and signal processing : Wave propagation

ToC Category:
Diffraction and Gratings

Original Manuscript: August 31, 2009
Manuscript Accepted: September 14, 2009
Published: November 5, 2009

Al-Aakhir A. Rogers, Scott Samson, and Sunny Kedia, "Far-field evanescent wave propagation using coupled subwavelength gratings for a MEMS sensor," J. Opt. Soc. Am. A 26, 2526-2531 (2009)

Sort:  Author  |  Year  |  Journal  |  Reset  


  1. M. Ishimori, Y. Kanamori, M. Sasaki, and K. Hane, “Subwavelength antireflection gratings for light emitting diodes and photodiodes fabricated by fast atom beam etching,” Jpn. J. Appl. Phys. 41, 4346-4349 (2002). [CrossRef]
  2. H. S. Lee, Y. T. Yoon, S. S. Lee, S. H. Kim, and K. D. Lee, “Color filter based on a subwavelength patterned metal grating,” Opt. Express 15, 15457-15463 (2007). [CrossRef] [PubMed]
  3. A. Barbara, P. Quemerais, E. Bustarret, and T. Lopez-Rios, “Optical transmission through subwavelength metallic gratings,” Phys. Rev. B 66, 161403 (2002). [CrossRef]
  4. H. Cao and A. Nahata, “Resonantly enhanced transmission of terahertz radiation through a periodic array of subwavelength apertures,” Opt. Express 12, 1004-1010 (2004). [CrossRef] [PubMed]
  5. J. Vörös, J. J. Ramsden, G. Csúcs, I. Szendrō, S. M. De Paul, M. Textor, and N. D. Spencer, “Optical grating coupler biosensors,” Biomaterials 23, 3699-3710 (2002). [CrossRef] [PubMed]
  6. R. Quidant, J. C. Weeber, A. Dereux, D. Peyrade, Y. Chen, and C. Girard, “Near-field observation of evanescent light wave coupling in subwavelength optical waveguides,” Europhys. Lett. 57, 191-197 (2002). [CrossRef]
  7. P. Cheben, D. Xu, S. Janz, and A. Densmore, “Subwavelength waveguide grating for mode conversion and light coupling in integrated optics,” Opt. Express 14, 4695-4702 (2006). [CrossRef] [PubMed]
  8. G. C. Cho, H. T. Chen, S. Kraatz, N. Karpowicz, and R. Kersting, “Apertureless terahertz near-field microscopy,” Semicond. Sci. Technol. 20, S286-S292 (2005). [CrossRef]
  9. K. Taniguchi and Y. Kanemitsu, “Development of an apertureless near-field optical microscope for nanoscale optical imaging at low temperatures,” Jpn. J. Appl. Phys. 44, 575-577 (2005). [CrossRef]
  10. B. E. Keeler, G. R. Bogart, and D. W. Carr, “Laterally deformable optical NEMS grating transducers for inertial sensing applications,” Proc. SPIE 5592, 306-312 (2005). [CrossRef]
  11. K. J. Gåsvik, Optical Metrology, 3rd ed. (Wiley, 2002). [CrossRef]
  12. J. Goodman, Introduction to Fourier Optics, 3rd ed. (Roberts, 2004).
  13. K. Yee, “Numerical solutions of initial boundary value problems involving Maxwell's equations in isotropic media,” IEEE Trans. Antennas Propag. 14, 302-307 (1966). [CrossRef]
  14. R. Hull, Properties of Crystalline Silicon (Institution of Engineering and Technology, 1999).
  15. R. Horvath, L. C. Wilcox, H. C. Pedersen, N. Skivesen, J. S. Hesthaven, and P. M. Johansen, “Analytical and numerical study on grating depth effects in grating coupled waveguide sensors,” Appl. Phys. B: Lasers Opt. 81, 65-73 (2005). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


Fig. 1 Fig. 2 Fig. 3

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited