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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Stephen A. Burns
  • Vol. 26, Iss. 12 — Dec. 1, 2009
  • pp: 2526–2531

Far-field evanescent wave propagation using coupled subwavelength gratings for a MEMS sensor

Al-Aakhir A. Rogers, Scott Samson, and Sunny Kedia  »View Author Affiliations


JOSA A, Vol. 26, Issue 12, pp. 2526-2531 (2009)
http://dx.doi.org/10.1364/JOSAA.26.002526


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Abstract

A technique was developed to couple near-field evanescent waves into observable diffraction orders in the far-field region. This investigation was of two gratings that have a 1.0 μ m grating period in glass and 1.1 μ m in silicon and are individually subwavelength, but when coupled together yield an 11.0 μ m effective grating period. This effective grating period is not subwavelength to a 1.550 μ m infrared incident source and exhibits higher diffraction orders. Optimum evanescent wave coupling efficiency was simulated by varying the grating thickness and the grating separation between the subwavelength gratings. This proposed evanescent wave coupling concept is being investigated for use in a bulk silicon MEMS accelerometer.

© 2009 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(050.6624) Diffraction and gratings : Subwavelength structures
(070.7345) Fourier optics and signal processing : Wave propagation

ToC Category:
Diffraction and Gratings

History
Original Manuscript: August 31, 2009
Manuscript Accepted: September 14, 2009
Published: November 5, 2009

Citation
Al-Aakhir A. Rogers, Scott Samson, and Sunny Kedia, "Far-field evanescent wave propagation using coupled subwavelength gratings for a MEMS sensor," J. Opt. Soc. Am. A 26, 2526-2531 (2009)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-26-12-2526


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