Far-field evanescent wave propagation using coupled subwavelength gratings for a MEMS sensor
JOSA A, Vol. 26, Issue 12, pp. 2526-2531 doi:10.1364/JOSAA.26.002526
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- OCIS Codes:
- (050.1950) Diffraction and gratings : Diffraction gratings
- (050.6624) Diffraction and gratings : Subwavelength structures
- (070.7345) Fourier optics and signal processing : Wave propagation
Diffraction and Gratings
Citation
Al-Aakhir A. Rogers, Scott Samson, and Sunny Kedia, "Far-field evanescent wave propagation using coupled subwavelength gratings for a MEMS sensor," J. Opt. Soc. Am. A 26, 2526-2531 (2009)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-26-12-2526
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A technique was developed to couple near-field evanescent waves into observable diffraction orders in the far-field region. This investigation was of two gratings that have a 1.0 μm grating period in glass and 1.1 μm in silicon and are individually subwavelength, but when coupled together yield an 11.0 μm effective grating period. This effective grating period is not subwavelength to a 1.550 μm infrared incident source and exhibits higher diffraction orders. Optimum evanescent wave coupling efficiency was simulated by varying the grating thickness and the grating separation between the subwavelength gratings. This proposed evanescent wave coupling concept is being investigated for use in a bulk silicon MEMS accelerometer.
© 2009 Optical Society of America
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History
Original Manuscript: August 31, 2009
Manuscript Accepted: September 14, 2009
Published: November 5, 2009
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Author Affiliations
SRI International
University of South Florida
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