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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Stephen A. Burns
  • Vol. 26, Iss. 12 — Dec. 1, 2009
  • pp: 2538–2549

Perturbation methods in optics: application to the interferometric measurement of surfaces

Eugenio Garbusi and Wolfgang Osten  »View Author Affiliations


JOSA A, Vol. 26, Issue 12, pp. 2538-2549 (2009)
http://dx.doi.org/10.1364/JOSAA.26.002538


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Abstract

Manufacturing and misalignment errors are present in every optical system. Usually these errors lead to intolerable wavefront deviations and system inaccuracies if they are not characterized and taken into consideration. In the interferometric measurement of surfaces, the characterization of the interferometer aberrations plays a central role, since unknown phase contributions lead to an erroneous assessment of the test surface and therefore an incorrect estimation of the performance of an optical system. In this work, we present a method for the interferometric characterization of surfaces based on the principles of Hamilton’s characteristic functions and perturbation theory. The application of the proposed method to an interferometer for the measurement of aspherical surfaces is shown.

© 2009 Optical Society of America

OCIS Codes
(120.3940) Instrumentation, measurement, and metrology : Metrology
(220.1250) Optical design and fabrication : Aspherics
(220.3620) Optical design and fabrication : Lens system design

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: June 5, 2009
Manuscript Accepted: September 3, 2009
Published: November 9, 2009

Citation
Eugenio Garbusi and Wolfgang Osten, "Perturbation methods in optics: application to the interferometric measurement of surfaces," J. Opt. Soc. Am. A 26, 2538-2549 (2009)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-26-12-2538

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