Large-area maskless surface plasmon interference for one- and two-dimensional periodic nanoscale feature patterning
JOSA A, Vol. 27, Issue 1, pp. 95-99 (2010)
http://dx.doi.org/10.1364/JOSAA.27.000095
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Abstract
A promising maskless surface-plasmon-interference nanoscale lithographic technique is proposed and demonstrated experimentally in this paper. One-dimensional (grating-type) and two-dimensional (pillar-type) nanocale features were patterned on the photoresist layer using a
© 2009 Optical Society of America
OCIS Codes
(220.3740) Optical design and fabrication : Lithography
(240.6680) Optics at surfaces : Surface plasmons
(260.3910) Physical optics : Metal optics
ToC Category:
Optical Design and Fabrication
History
Original Manuscript: September 9, 2009
Revised Manuscript: October 26, 2009
Manuscript Accepted: October 30, 2009
Published: December 11, 2009
Citation
K. V. Sreekanth and V. M. Murukeshan, "Large-area maskless surface plasmon interference for one- and two-dimensional periodic nanoscale feature patterning," J. Opt. Soc. Am. A 27, 95-99 (2010)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-27-1-95
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