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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Franco Gori
  • Vol. 27, Iss. 1 — Jan. 1, 2010
  • pp: 95–99

Large-area maskless surface plasmon interference for one- and two-dimensional periodic nanoscale feature patterning

K. V. Sreekanth and V. M. Murukeshan  »View Author Affiliations


JOSA A, Vol. 27, Issue 1, pp. 95-99 (2010)
http://dx.doi.org/10.1364/JOSAA.27.000095


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Abstract

A promising maskless surface-plasmon-interference nanoscale lithographic technique is proposed and demonstrated experimentally in this paper. One-dimensional (grating-type) and two-dimensional (pillar-type) nanocale features were patterned on the photoresist layer using a 364 nm illumination wavelength source with a single exposure, by employing a custom-made prism layer configuration. Large-area patterns of grating lines and pillars with feature size 90 nm were realized experimentally using this configuration.

© 2009 Optical Society of America

OCIS Codes
(220.3740) Optical design and fabrication : Lithography
(240.6680) Optics at surfaces : Surface plasmons
(260.3910) Physical optics : Metal optics

ToC Category:
Optical Design and Fabrication

History
Original Manuscript: September 9, 2009
Revised Manuscript: October 26, 2009
Manuscript Accepted: October 30, 2009
Published: December 11, 2009

Citation
K. V. Sreekanth and V. M. Murukeshan, "Large-area maskless surface plasmon interference for one- and two-dimensional periodic nanoscale feature patterning," J. Opt. Soc. Am. A 27, 95-99 (2010)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-27-1-95

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