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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Editor: Franco Gori
  • Vol. 27, Iss. 12 — Dec. 1, 2010
  • pp: 2660–2669

Parameter-tolerant binary gratings

Thomas Kämpfe and Olivier Parriaux  »View Author Affiliations

JOSA A, Vol. 27, Issue 12, pp. 2660-2669 (2010)

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A normalized modal analysis of binary gratings under normal TE incidence involving the most condensed set of optogeometrical parameters gives a complete solution to the problem of canceling the 0 th transmitted order in phase masks of a low-to-high refractive index ratio down to 0.5 with a large tolerance on the corrugation duty cycle or a large spectral bandwidth. The solution is presented in the form of single normalized 3D charts which shed light on the fulfillment of the 0 th - order cancellation condition: balanced excitation and π-phase difference between two grating modes. Examples of tolerant gratings are given.

© 2010 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1380) Diffraction and gratings : Binary optics
(050.1950) Diffraction and gratings : Diffraction gratings
(220.3740) Optical design and fabrication : Lithography
(260.1960) Physical optics : Diffraction theory
(260.3160) Physical optics : Interference

ToC Category:
Diffraction and Gratings

Original Manuscript: July 30, 2010
Revised Manuscript: October 27, 2010
Manuscript Accepted: October 28, 2010
Published: November 23, 2010

Thomas Kämpfe and Olivier Parriaux, "Parameter-tolerant binary gratings," J. Opt. Soc. Am. A 27, 2660-2669 (2010)

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