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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Franco Gori
  • Vol. 27, Iss. 3 — Mar. 1, 2010
  • pp: 366–371

Polarization dependence of the quasi-Talbot effect of the high-density grating

Shuyun Teng, Wenzhen Guo, and Chuanfu Cheng  »View Author Affiliations


JOSA A, Vol. 27, Issue 3, pp. 366-371 (2010)
http://dx.doi.org/10.1364/JOSAA.27.000366


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Abstract

Diffractions by the one-dimensional high-density grating in the near field with TM and TE polarization illuminations are studied, and the diffraction intensity distributions are calculated with the finite-difference time-domain technique. The calculation results show that the diffractions of the high-density grating with different polarization illuminations are different. The quasi-Talbot image of the grating depends on the polarization of the incident wave, and the existence condition of the quasi-Talbot image of the grating in the near field also changes with the polarization of the incident wave. We present explanations based on the vector distribution of the energy flow density. These studies on the polarization dependence of the quasi-Talbot imaging of the high-density grating are helpful for the application of the grating to near-field photolithography.

© 2010 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(070.6760) Fourier optics and signal processing : Talbot and self-imaging effects
(230.1950) Optical devices : Diffraction gratings
(260.2110) Physical optics : Electromagnetic optics

ToC Category:
Diffraction and Gratings

History
Original Manuscript: August 11, 2009
Revised Manuscript: December 14, 2009
Manuscript Accepted: December 17, 2009
Published: February 8, 2010

Citation
Shuyun Teng, Wenzhen Guo, and Chuanfu Cheng, "Polarization dependence of the quasi-Talbot effect of the high-density grating," J. Opt. Soc. Am. A 27, 366-371 (2010)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-27-3-366

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