OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Franco Gori
  • Vol. 27, Iss. 5 — May. 1, 2010
  • pp: 1012–1023

High-numerical-aperture image simulation using Babinet’s principle

Seung-Hune Yang, Tom Milster, Jong Rak Park, and Jun Zhang  »View Author Affiliations


JOSA A, Vol. 27, Issue 5, pp. 1012-1023 (2010)
http://dx.doi.org/10.1364/JOSAA.27.001012


View Full Text Article

Enhanced HTML    Acrobat PDF (1477 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Simulation techniques are developed for high-numerical-aperture (NA) polarized microscopy with Babinet’s principle, including partial coherence and vector diffraction for non-periodic geometries. The model includes vector illumination and diffraction in high-NA (up to NA = 3.5 ) object space that is imaged into low-NA image space and recorded on an image sensor. A mathematical model for the Babinet approach is developed and interpreted that includes partial coherence using expanded mutual intensity, where object reflective characteristics modify the coherence functions. Simulation results of the Babinet’s principle approach are compared with those of rigorous coupled wave theory (RCWT) for periodic structures to investigate the accuracy of this approach and its limitations.

© 2010 Optical Society of America

OCIS Codes
(110.4980) Imaging systems : Partial coherence in imaging
(210.4245) Optical data storage : Near-field optical recording
(050.6624) Diffraction and gratings : Subwavelength structures

ToC Category:
Imaging Systems

History
Original Manuscript: August 12, 2009
Revised Manuscript: December 28, 2009
Manuscript Accepted: January 14, 2010
Published: April 12, 2010

Citation
Seung-Hune Yang, Tom Milster, Jong Rak Park, and Jun Zhang, "High-numerical-aperture image simulation using Babinet’s principle," J. Opt. Soc. Am. A 27, 1012-1023 (2010)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-27-5-1012


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. G. S. Kino and S. M. Mansfield, “Solid immersion lens photon tunneling microscope,” (invited paper), Proc. SPIE  1556, 2–10(1992). [CrossRef]
  2. T. Chen, T. D. Milster, S.-H. Yang, and D. Hansen, “Evanescent imaging with induced polarization by using a solid immersion lens,” Opt. Lett.  32, 124–126, January 2007. [CrossRef]
  3. T. Chen, T. D. Milster, and S.-H. Yang, “Experimental investigation of photomask with near-field polarization imaging,” Proc. SPIE  6349, 634953 (2006). [CrossRef]
  4. R. Brunner, A. Menck, R. Steiner, G. Buchda, S. Weissenberg, U. Horn, and A. M. Zibold, “Immersion mask inspection with hybrid-microscopic systems at 193 nm,” Proc. SPIE  5567, 887–893(2004). [CrossRef]
  5. K. Saito, T. Ishimoto, T. Kondo, A. Nakaoki, S. Masuhara, M. Furuki, and M. Yamamoto, “Readout Method for Read Only Memory Signal and Air Gap Control Signal in a Near Field Optical Disc System,” J. Appl. Phys.  41, 1898–1902, 2002. [CrossRef]
  6. M. Lang, E. Aspnes, and T. D. Milster, “Geometrical analysis of third-order aberrations for a solid immersion lens,” Opt. Express  16, 20008–20028 (2008). [CrossRef] [PubMed]
  7. E. Wolf, “Electromagnetic Diffraction in Optical Systems. I. An Integral Representation of the Image Field,” Proc. R. Soc. London Ser. A  253, 349–357 (1957). [CrossRef]
  8. M. Mansuripur, “Distribution of light at and near the focus of high-numerical-aperture objectives,” J. Opt. Soc. Am. A  3, 2086–2094 (1986). [CrossRef]
  9. D. G. Flagello, T. D. Milster, and A. E. Rosenbluth, “Theory of high-NA imaging in homogeneous thin films,” J. Opt. Soc. Am. A  13, 53–64 (1996). [CrossRef]
  10. J. S. Jo, T. D. Milster, and J. K. Erwin, “Phase and amplitude apodization induced by focusing through an evanescent gap in a solid immersion lens microscope,” Opt. Eng.  41, 1866–1875 (2002). [CrossRef]
  11. M. Totzeck, “Numerical simulation of high-NA quantitative polarization microscopy and corresponding near-fields,” Optik  112, 399–406 (2001). [CrossRef]
  12. T. D. Milster, “New way to describe diffraction from optical disks,” Appl. Opt.  37, 6878–6883 (1998). [CrossRef]
  13. H. H. Hopkins, “On the Diffraction Theory of Optical Images,” Proc. R. Soc. London Ser. A  217, 408–432 (1953). [CrossRef]
  14. H. A. Macleod, Thin Film Optical Filters (McGraw-Hill, 1989).
  15. See: http://www.optics.arizona.edu/milster/optisca/DOCUMENTATION/uafdtd%20GUI%20MANUAL%20111906b.pdf.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited