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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Franco Gori
  • Vol. 27, Iss. 9 — Sep. 1, 2010
  • pp: 1920–1926

Expansion of image interaction by the eigenfunction of the transmission cross coefficient to show the interaction between features

Kenji Yamazoe and Andrew R. Neureuther  »View Author Affiliations


JOSA A, Vol. 27, Issue 9, pp. 1920-1926 (2010)
http://dx.doi.org/10.1364/JOSAA.27.001920


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Abstract

This paper presents a method for evaluating the image interaction of two object patterns of arbitrary shape in partially coherent imaging. The interaction is shown to be the interference of the eigenfunctions of the transmission cross coefficient at the image plane convolved with each of the object patterns. For two arbitrary patterns, the i th eigenfunction convolved with one object pattern interferes only with the i th eigenfunction convolved with the second object pattern. This method is useful for understanding how object feature shapes influence image interactions, and examples are simulated to evaluate the method. A method to determine constructive and destructive interference areas is also introduced.

© 2010 Optical Society of America

OCIS Codes
(110.2990) Imaging systems : Image formation theory
(110.4980) Imaging systems : Partial coherence in imaging
(110.5220) Imaging systems : Photolithography

ToC Category:
Imaging Systems

History
Original Manuscript: April 29, 2010
Revised Manuscript: June 23, 2010
Manuscript Accepted: July 9, 2010
Published: August 5, 2010

Citation
Kenji Yamazoe and Andrew R. Neureuther, "Expansion of image interaction by the eigenfunction of the transmission cross coefficient to show the interaction between features," J. Opt. Soc. Am. A 27, 1920-1926 (2010)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-27-9-1920


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References

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