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Self-consistent optical constants of SiC thin films |
JOSA A, Vol. 28, Issue 11, pp. 2340-2345 (2011)
http://dx.doi.org/10.1364/JOSAA.28.002340
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Abstract
The optical constants of ion-beam-sputtered SiC films have been measured by ellipsometry in the 190 to
© 2011 Optical Society of America
OCIS Codes
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(160.6000) Materials : Semiconductor materials
(230.4170) Optical devices : Multilayers
(260.7200) Physical optics : Ultraviolet, extreme
(310.6860) Thin films : Thin films, optical properties
ToC Category:
Instrumentation, Measurement, and Metrology
History
Original Manuscript: June 17, 2011
Revised Manuscript: September 22, 2011
Manuscript Accepted: September 27, 2011
Published: October 26, 2011
Citation
Juan I. Larruquert, Antonio P. Pérez-Marín, Sergio García-Cortés, Luis Rodríguez-de Marcos, José A. Aznárez, and José A. Méndez, "Self-consistent optical constants of SiC thin films," J. Opt. Soc. Am. A 28, 2340-2345 (2011)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-28-11-2340
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