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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Editor: Franco Gori
  • Vol. 28, Iss. 4 — Apr. 1, 2011
  • pp: 576–580

Full wave optical profilometry

S. Arhab, G. Soriano, K. Belkebir, A. Sentenac, and H. Giovannini  »View Author Affiliations

JOSA A, Vol. 28, Issue 4, pp. 576-580 (2011)

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We show that tomographic diffractive microscopy can be used for profilometry applications with high transverse resolution. We present an iterative reconstruction procedure, based on a rigorous wave scattering model, that permits us to retrieve the profile of rough metallic interfaces from the complex scattered field. The transversal resolution is subwavelength, and can even fall below the classical resolution limit if the profile is rough enough for multiple interactions to occur. Large profiles, with tens of wavelength size, can be investigated.

© 2011 Optical Society of America

OCIS Codes
(290.3200) Scattering : Inverse scattering
(290.5880) Scattering : Scattering, rough surfaces
(180.1655) Microscopy : Coherence tomography
(050.1755) Diffraction and gratings : Computational electromagnetic methods

ToC Category:

Original Manuscript: December 15, 2010
Revised Manuscript: January 31, 2011
Manuscript Accepted: January 31, 2011
Published: March 15, 2011

Virtual Issues
Vol. 6, Iss. 5 Virtual Journal for Biomedical Optics

S. Arhab, G. Soriano, K. Belkebir, A. Sentenac, and H. Giovannini, "Full wave optical profilometry," J. Opt. Soc. Am. A 28, 576-580 (2011)

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