OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Franco Gori
  • Vol. 28, Iss. 5 — May. 1, 2011
  • pp: 903–911

Effect of polarization on a solid immersion lens of arbitrary thickness

Kenneth M. Lim, Gary C. F. Lee, Colin J. R. Sheppard, Jacob C. H. Phang, Chee Leong Wong, and Xudong Chen  »View Author Affiliations


JOSA A, Vol. 28, Issue 5, pp. 903-911 (2011)
http://dx.doi.org/10.1364/JOSAA.28.000903


View Full Text Article

Enhanced HTML    Acrobat PDF (1088 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A solid immersion lens can be applied for high-resolution subsurface analysis of integrated circuits and other physical systems. We present a thorough analysis of the focal field distribution of a solid immersion lens system of arbitrary thickness. Cases of linearly and radially polarized illumination are examined and accurate expressions derived for the electric field in the image space. The effect of the spherical interface on both transverse and axial intensity profiles is analyzed. The performance and practicality of configurations deviating from the hemispherical and aplanatic cases are studied. The results show that optimal resolution is obtained at focal positions between the hemispherical and aplanatic points when radially polarized illumination is applied.

© 2011 Optical Society of America

OCIS Codes
(180.0180) Microscopy : Microscopy
(260.5430) Physical optics : Polarization
(350.5730) Other areas of optics : Resolution

ToC Category:
Physical Optics

History
Original Manuscript: December 21, 2010
Revised Manuscript: March 4, 2011
Manuscript Accepted: March 4, 2011
Published: April 29, 2011

Virtual Issues
Vol. 6, Iss. 6 Virtual Journal for Biomedical Optics

Citation
Kenneth M. Lim, Gary C. F. Lee, Colin J. R. Sheppard, Jacob C. H. Phang, Chee Leong Wong, and Xudong Chen, "Effect of polarization on a solid immersion lens of arbitrary thickness," J. Opt. Soc. Am. A 28, 903-911 (2011)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-28-5-903


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. W. Qiang, L. P. Ghislan, and V. B. Elings, “Imaging with solid immersion lenses, spatial resolution, and applications,” Proc. IEEE 88, 1398–1491 (2000). [CrossRef]
  2. Y. Zhang, C. Zheng, and Y. Zou, “Focal-field distribution of the solid immersion lens system with an annular filter,” Int. J. Light Electron. Opt. 115, 277–280 (2004). [CrossRef]
  3. Y. Zhang, “Theoretical study of near-field optical storage with a solid immersion lens,” J. Opt. Soc. Am. A 23, 2132–2136 (2006). [CrossRef]
  4. L. E. Helseth, “Roles of polarization, phase and amplitude in solid immersion lens systems,” Opt. Commun. 191, 161–172(2001). [CrossRef]
  5. S. M. Mansfield and G. S. Kino, “Solid immersion microscope,” Appl. Phys. Lett. 57, 2615–2616 (1990). [CrossRef]
  6. S. H. Goh and C. J. R. Sheppard, “High aperture focusing through a spherical interface: application to refractive solid immersion lens (RSIL) for subsurface imaging,” Opt. Commun. 282, 1036–1041 (2009). [CrossRef]
  7. B. Richards and E. Wolf, “Electromagnetic diffraction in optical systems II. structure of the image field in an aplanatic system,” Proc. R. Soc. London 253, 358–379 (1959). [CrossRef]
  8. L. Novotny and B. Hecht, Principles of Nano-Optics, 1st ed. (Cambridge University Press, 2006).
  9. A. N. Vamivakas, R. D. Younger, B. B. Goldberg, A. K. Swan, M. S. Unlu, E. R. Behringer, and S. B. Ippolito, “A case study for optics: the solid immersion microscope,” Am. J. Phys. 76, 758–768 (2008). [CrossRef]
  10. P. Torok, P. Varga, Z. Laczik, and G. R. Booker, “Electromagnetic diffraction of light focused through a planar interface between materials of mismatched refractive indices: an integral representation,” J. Opt. Soc. Am. A 12, 325–332 (1995). [CrossRef]
  11. E. Wolf, “Electromagnetic diffraction in optical systems. I. an integral representation of the image field,” Proc. R. Soc. London 253, 349–357 (1959). [CrossRef]
  12. L. E. Helseth, “Electromagnetic focusing through a tilted dielectric surface,” Opt. Commun. 215, 247–250 (2003). [CrossRef]
  13. G. M. Lerman and U. Levy, “Effect of radial polarization and apodization on spot size under tight focusing conditions,” Opt. Express 16, 4567–4581 (2008). [CrossRef] [PubMed]
  14. Y. Kozawa and S. Sato, “Sharper focal spot formed by higher-order radially polarized laser beams,” J. Opt. Soc. Am. A 24, 1793–1798 (2007). [CrossRef]
  15. C. J. R. Sheppard and A. Choudhury, “Annular pupils, radial polarization, and superresolution,” Appl. Opt. 43, 4322–4327(2004). [CrossRef] [PubMed]
  16. C. J. R. Sheppard and E. Y. S. Yew, “Performance parameters for focusing of radial polarization,” Opt. Lett. 33, 497–499 (2008). [CrossRef] [PubMed]
  17. W. H. Steel, “Axicons with spherical surfaces,” in Colloquia of the International Commission for Optics: Optics in Metrology, P.Mollet, ed. (Pergamon, 1960), pp. 181–192.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited