A solid immersion lens can be applied for high-resolution subsurface analysis of integrated circuits and other physical systems. We present a thorough analysis of the focal field distribution of a solid immersion lens system of arbitrary thickness. Cases of linearly and radially polarized illumination are examined and accurate expressions derived for the electric field in the image space. The effect of the spherical interface on both transverse and axial intensity profiles is analyzed. The performance and practicality of configurations deviating from the hemispherical and aplanatic cases are studied. The results show that optimal resolution is obtained at focal positions between the hemispherical and aplanatic points when radially polarized illumination is applied.
© 2011 Optical Society of America
Original Manuscript: December 21, 2010
Revised Manuscript: March 4, 2011
Manuscript Accepted: March 4, 2011
Published: April 29, 2011
Vol. 6, Iss. 6 Virtual Journal for Biomedical Optics
Kenneth M. Lim, Gary C. F. Lee, Colin J. R. Sheppard, Jacob C. H. Phang, Chee Leong Wong, and Xudong Chen, "Effect of polarization on a solid immersion lens of arbitrary thickness," J. Opt. Soc. Am. A 28, 903-911 (2011)