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Control of the principal refractive indices in biaxial metal oxide films |
JOSA A, Vol. 28, Issue 9, pp. 1830-1840 (2011)
http://dx.doi.org/10.1364/JOSAA.28.001830
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Abstract
We provide both an extensive experimental characterization and a model for metal oxide, slanted columnar thin films fabricated using glancing angle deposition. The model is applicable to slanted posts of any type, deposited at a constant deposition angle, with variable azimuthal substrate rotation. The model is capable of predicting the column tilt, principal refractive indices, and in-plane birefringence under a single unified framework, given knowledge of common material parameters. This paper also establishes a number of additional important results, including the occurrence of negative in-plane birefringence and the occurrence of uniaxial films with nonzero columnar tilt.
© 2011 Optical Society of America
OCIS Codes
(160.0160) Materials : Materials
(160.1190) Materials : Anisotropic optical materials
(310.0310) Thin films : Thin films
(310.6860) Thin films : Thin films, optical properties
(160.4236) Materials : Nanomaterials
(310.6805) Thin films : Theory and design
ToC Category:
Thin Films
History
Original Manuscript: April 11, 2011
Revised Manuscript: June 27, 2011
Manuscript Accepted: July 18, 2011
Published: August 18, 2011
Citation
Nicholas G. Wakefield, Jason B. Sorge, Michael T. Taschuk, Louis W. Bezuidenhout, Michael J. Brett, and Jeremy C. Sit, "Control of the principal refractive indices in biaxial metal oxide films," J. Opt. Soc. Am. A 28, 1830-1840 (2011)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-28-9-1830
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