OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Franco Gori
  • Vol. 29, Iss. 12 — Dec. 1, 2012
  • pp: 2591–2597

Two models for partially coherent imaging

Kenji Yamazoe  »View Author Affiliations


JOSA A, Vol. 29, Issue 12, pp. 2591-2597 (2012)
http://dx.doi.org/10.1364/JOSAA.29.002591


View Full Text Article

Enhanced HTML    Acrobat PDF (815 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

This paper discusses the physical difference between two image formation approaches for partially coherent imaging. In one approach, the pupil function is shifted according to illumination condition as in the transmission cross coefficient (TCC) approach, whereas in the other approach, the object spectrum is shifted. Although the two approaches result in identical images, they are built on distinct physical models. Eigenfunction analysis reveals that the TCC approach is built on an artificial optical model only for image calculation. Therefore, the two approaches are not interchangeable except for image calculation. Such an example is found in calculating the entropy in an imaging system.

© 2012 Optical Society of America

OCIS Codes
(110.2990) Imaging systems : Image formation theory
(110.4980) Imaging systems : Partial coherence in imaging

ToC Category:
Imaging Systems

History
Original Manuscript: August 13, 2012
Revised Manuscript: October 22, 2012
Manuscript Accepted: October 24, 2012
Published: November 21, 2012

Citation
Kenji Yamazoe, "Two models for partially coherent imaging," J. Opt. Soc. Am. A 29, 2591-2597 (2012)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-29-12-2591


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. F. Zernike, “The concept of degree of coherence and its application to optical problems,” Physica 5, 785–795 (1938). [CrossRef]
  2. J. W. Goodman, Statistical Optics, Wiley Classical Library ed. (Wiley, 2000), Chap. 7.
  3. H. H. Hopkins, “The concept of partial coherence in optics,” Proc. Royal Soc. 208, 263–277 (1951). [CrossRef]
  4. Y. Ichioka and T. Suzuki, “Image of a periodic complex object in an optical system under partially coherent illumination,” J. Opt. Soc. Am. 66, 921–932 (1976). [CrossRef]
  5. B. J. Lin, “Partially coherent imaging in two dimensions and the theoretical limits of projection printing in microfabrication,” IEEE Trans. Electron. Devices 27, 931–938 (1980). [CrossRef]
  6. H. H. Hopkins, “On the diffraction theory of optical images,” Proc. Royal Soc. 217, 408–432 (1953). [CrossRef]
  7. M. Born and E. Wolf, Principles of Optics, 7th ed. (Cambridge University, 2002), Chap. 10.
  8. H. Gamo, “Matrix treatment of partial coherence,” in Progress in Optics, E. Wolf, ed. (North-Holland, 1964), Vol. III, Chap. 3.
  9. J. Peřina, “Theory of coherence,” Czech. J. Phys. 19, 151–194 (1969). [CrossRef]
  10. B. E. A. Saleh and M. Rabbani, “Simulation of partially coherent imagery in the space and frequency domains and by modal expansion,” Appl. Opt. 21, 2770–2777 (1982). [CrossRef]
  11. J. van der Gracht, “Simulation of partially coherent imaging by outer-product expansion,” Appl. Opt. 33, 3725–3731(1994). [CrossRef]
  12. R. J. Socha and A. R. Neureuther, “Propagation effects of partially coherence in optical lithography,” J. Vac. Sci. Technol. B 14, 3724–3729 (1996). [CrossRef]
  13. K. Yamazoe, “Computation theory of partially coherent imaging by stacked pupil shift matrix,” J. Opt. Soc. Am. A 25, 3111–3119 (2008). [CrossRef]
  14. R. Miyakawa, P. Naulleau, and A. Zakhor, “Iterative procedure for in situ extreme ultraviolet optical testing with an incoherent source,” J. Vac. Sci. Technol. B 27, 2927–2930 (2009). [CrossRef]
  15. Y. C. Pati and T. Kailath, “Phase-shifting masks for microlithography: automated design and mask requirements,” J. Opt. Soc. Am. A 11, 2438–2452 (1994). [CrossRef]
  16. M. J. Bastiaans, “Applications of the Wigner distribution function to partially coherent light,” J. Opt. Soc. Am. A 3, 1227–1238 (1986). [CrossRef]
  17. S. B. Mehta and C. J. R. Sheppard, “Phase-space representation of partially coherent imaging systems using the Cohen class distribution,” Opt. Lett. 35, 348–350 (2010). [CrossRef]
  18. R. Barakat, “Partially coherent imaginary in the presence of aberrations,” Optica Acta 17, 337–347 (1970). [CrossRef]
  19. K. Yamazoe, “Two matrix approaches for aerial image formation obtained by extending and modifying the transmission cross coefficients,” J. Opt. Soc. Am. A 271311–1321 (2010). [CrossRef]
  20. E. L. O’Neill, Introduction to Statistical Optics (Dover, 2003), Chap. 8.
  21. K. Yamazoe and A. R. Neureuther, “Numerical experiment of the Shannon entropy in partially coherent imaging by Koehler illumination to show the relationship to degree of coherence,” J. Opt. Soc. Am. A 28, 448–454 (2011). [CrossRef]
  22. K. Yamazoe, “Coherency matrix formulation for partially coherent imaging to evaluate the degree of coherence for image,” J. Opt. Soc. Am. A 29, 1529–1536 (2012). [CrossRef]
  23. W. Singer, M. Totzeck, and H. Gross, “The Abbe theory of imaging,” in Handbook of Optical Systems 2, H. Gross, ed. (Wiley-VCH, 2005), Chap. 21.
  24. J. W. Goodman, Statistical Optics, Wiley Classical Library ed. (Wiley, 2000), Chap. 5.
  25. C. Spence, “Full-chip lithography simulation and design analysis—how OPC is changing IC design,” Proc. SPIE 5751, 1–14 (2005). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited