A new hybrid finite-element/rigorous coupled wave analysis formulation is presented for the modeling of electromagnetic wave interactions with doubly periodic structures. The structures under investigation are periodic in two dimensions and have a finite extent in the third dimension. The proposed model can handle structures that have material properties varying arbitrarily in any of the dimensions within the unit cell. Employment of Fourier series expansion and Floquet’s theory in one of the periodic dimensions helps to reduce the dimension of the mesh. Results obtained from alternative methods are used to verify the proposed method’s validity.
© 2012 Optical Society of America
Diffraction and Gratings
Original Manuscript: February 7, 2012
Revised Manuscript: April 18, 2012
Manuscript Accepted: April 19, 2012
Published: June 22, 2012
Mustafa Kuloglu and Robert Lee, "Hybrid finite-element/rigorous coupled wave analysis for scattering from three-dimensional doubly periodic structures," J. Opt. Soc. Am. A 29, 1399-1406 (2012)