OSA's Digital Library

Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 3, Iss. 11 — Nov. 1, 1986
  • pp: 1794–1802

Multiple-wavelength ellipsometry in thin uniaxial nonabsorbing films

Adel F. Antippa, Roger M. Leblanc, and Daniel Ducharme  »View Author Affiliations


JOSA A, Vol. 3, Issue 11, pp. 1794-1802 (1986)
http://dx.doi.org/10.1364/JOSAA.3.001794


View Full Text Article

Enhanced HTML    Acrobat PDF (842 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We develop and solve the equations of multiple-wavelength ellipsometry for thin uniaxial nonabsorbing films. We show that the values of the thickness and the real refractive indices (parallel and perpendicular to the optical axis) of the thin film can be obtained by three measurements, at three different wavelengths, of the phase difference (between the filmed and bare substrate phase changes caused by reflection), provided that the refractive indices of both the incident medium and the substrate are significantly dispersive. We also show, in the case of a dispersive thin film, how to determine the indices of refraction in terms of wavelength up to any desired accuracy by making the appropriate number of measurements of the phase difference at different wavelengths.

© 1986 Optical Society of America

History
Original Manuscript: October 3, 1985
Manuscript Accepted: May 16, 1986
Published: November 1, 1986

Citation
Adel F. Antippa, Roger M. Leblanc, and Daniel Ducharme, "Multiple-wavelength ellipsometry in thin uniaxial nonabsorbing films," J. Opt. Soc. Am. A 3, 1794-1802 (1986)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-3-11-1794

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you wish to use one of your free member downloads to view the figures, click "Enhanced HTML" above and access the figures from the article itself or from the navigation tab.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

If you are accessing the full text through a member bundle, please use the Enhanced HTML link to gain access to the citation lists and other restricted features. Note that accessing both the PDF and HTML versions of an article will count as only one download against your account.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited