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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Editor: Franco Gori
  • Vol. 30, Iss. 7 — Jul. 1, 2013
  • pp: 1310–1319

Optimizing the precision of a multichannel three-polarizer spectroscopic ellipsometer

Won Chegal, Jeong Pyo Lee, Hyun Mo Cho, Sang-Wook Han, and Yong Jai Cho  »View Author Affiliations


JOSA A, Vol. 30, Issue 7, pp. 1310-1319 (2013)
http://dx.doi.org/10.1364/JOSAA.30.001310


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Abstract

We developed a multichannel three-polarizer spectroscopic ellipsometer based on a data acquisition algorithm for achieving optimized precision. This algorithm measures unnormalized Fourier coefficients accurately and precisely. Offset angles for optical elements were obtained as wavelength-independent values using regression calibration. Derived subsets of data reduction functions were used to calculate sample parameters. Correlation coefficients of Fourier coefficients were used to calculate errors in the sample parameters. Mean standard deviations of the sample parameters for each data reduction method were compared to identify the best method. This approach could be used to identify suitable precision optimization methods for other rotating-element ellipsometers.

© 2013 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation

ToC Category:
Instrumentation, Measurement, and Metrology

History
Original Manuscript: March 4, 2013
Revised Manuscript: May 14, 2013
Manuscript Accepted: May 15, 2013
Published: June 5, 2013

Citation
Won Chegal, Jeong Pyo Lee, Hyun Mo Cho, Sang-Wook Han, and Yong Jai Cho, "Optimizing the precision of a multichannel three-polarizer spectroscopic ellipsometer," J. Opt. Soc. Am. A 30, 1310-1319 (2013)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-30-7-1310


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