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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Editor: Franco Gori
  • Vol. 30, Iss. 7 — Jul. 1, 2013
  • pp: 1310–1319

Optimizing the precision of a multichannel three-polarizer spectroscopic ellipsometer

Won Chegal, Jeong Pyo Lee, Hyun Mo Cho, Sang-Wook Han, and Yong Jai Cho  »View Author Affiliations

JOSA A, Vol. 30, Issue 7, pp. 1310-1319 (2013)

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We developed a multichannel three-polarizer spectroscopic ellipsometer based on a data acquisition algorithm for achieving optimized precision. This algorithm measures unnormalized Fourier coefficients accurately and precisely. Offset angles for optical elements were obtained as wavelength-independent values using regression calibration. Derived subsets of data reduction functions were used to calculate sample parameters. Correlation coefficients of Fourier coefficients were used to calculate errors in the sample parameters. Mean standard deviations of the sample parameters for each data reduction method were compared to identify the best method. This approach could be used to identify suitable precision optimization methods for other rotating-element ellipsometers.

© 2013 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.6200) Instrumentation, measurement, and metrology : Spectrometers and spectroscopic instrumentation

ToC Category:
Instrumentation, Measurement, and Metrology

Original Manuscript: March 4, 2013
Revised Manuscript: May 14, 2013
Manuscript Accepted: May 15, 2013
Published: June 5, 2013

Won Chegal, Jeong Pyo Lee, Hyun Mo Cho, Sang-Wook Han, and Yong Jai Cho, "Optimizing the precision of a multichannel three-polarizer spectroscopic ellipsometer," J. Opt. Soc. Am. A 30, 1310-1319 (2013)

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  1. D. E. Aspnes, “Expanding horizons: new developments in ellipsometry and polarimetry,” Thin Solid Films 455–456, 3–13 (2004). [CrossRef]
  2. M. Losurdo, “Applications of ellipsometry in nanoscale science: needs, status, achievements and future challenges,” Thin Solid Films 519, 2575–2583 (2011). [CrossRef]
  3. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, 1987).
  4. M. Schubert, Infrared Ellipsometry on Semiconductor Layer Structures: Phonons, Plasmons, and Polaritons (Springer, 2004).
  5. R. W. Collins, I. An, J. Lee, and J. A. Zapien, “Multichannel ellipsometry,” in Handbook of Ellipsometry, H. G. Tompkins and E. A. Irene, eds. (William Andrew, 2005).
  6. H. Fujiwara, Spectroscopic Ellipsometry: Principles and Applications (Wiley, 2007).
  7. H. G. Tompkins, ed., Proceedings of the 5th International Conference on Spectroscopic Ellipsometry (Elsevier, 2011).
  8. I. An and R. W. Collins, “Waveform analysis with optical multichannel detectors: applications for rapid-scan spectroscopic ellipsometry,” Rev. Sci. Instrum. 62, 1904–1911 (1991). [CrossRef]
  9. N. V. Nguyen, B. S. Pudliner, I. An, and R. W. Collins, “Error correction for calibration and data reduction in rotating-polarizer ellipsometry: applications to a novel multichannel ellipsometer,” J. Opt. Soc. Am. A 8, 919–931 (1991). [CrossRef]
  10. D. E. Aspnes, “Optimizing precision of rotating-analyzer ellipsometers,” J. Opt. Soc. Am. 64, 639–646 (1974). [CrossRef]
  11. D. E. Aspnes, “Precision bounds to ellipsometric systems,” Appl. Opt. 14, 1131–1136 (1975). [CrossRef]
  12. R. W. Stobie, B. Rao, and M. J. Dignam, “Analysis of a novel ellipsometric technique with special advantages for infrared spectroscopy,” J. Opt. Soc. Am. 65, 25–28 (1975). [CrossRef]
  13. J. M. M. de Nijs and A. V. Silfhout, “Systematic and random errors in rotating-analyzer ellipsometry,” J. Opt. Soc. Am. A 5, 773–781 (1988). [CrossRef]
  14. R. Kleim, L. Kuntzler, and A. E. Ghemmaz, “Systematic errors in rotating-compensator ellipsometry,” J. Opt. Soc. Am. A 11, 2550–2559 (1994). [CrossRef]
  15. S. Bertucci, A. Pawlowski, N. Nicolas, L. Johann, A. E. Ghemmaz, N. Stein, and R. Kleim, “Systematic errors in fixed polarizer, rotating polarizer, sample, fixed analyzer spectroscopic ellipsometry,” Thin Solid Films 313–314, 73–78 (1998). [CrossRef]
  16. Z. Huang and J. Chu, “Optimizing precision of fixed-polarizer, rotating-polarizer, sample, and fixed-analyzer spectroscopic ellipsometry,” Appl. Opt. 39, 6390–6395 (2000). [CrossRef]
  17. A. E. Naciri, L. Broch, L. Johann, and R. Kleim, “Fixed polarizer, rotating-polarizer and fixed analyzer spectroscopic ellipsometer: accurate calibration method, effect of errors and testing,” Thin Solid Films 406, 103–112 (2002). [CrossRef]
  18. D. E. Aspnes, “Optimizing precision of rotating-analyzer and rotating-compensator ellipsometers,” J. Opt. Soc. Am. A 21, 403–410 (2004). [CrossRef]
  19. B. Johs and C. M. Herzinger, “Precision in ellipsometrically determined sample parameters: simulation and experiment,” Thin Solid Films 455–456, 66–71 (2004). [CrossRef]
  20. B. Johs and C. M. Herzinger, “Quantifying the accuracy of ellipsometer system,” Phys. Status Solidi C 5, 1031–1035 (2008). [CrossRef]
  21. L. Broch and L. Johann, “Optimizing precision of rotating compensator ellipsometry,” Phys. Status Solidi C 5, 1036–1040 (2008). [CrossRef]
  22. Y. J. Cho, W. Chegal, and H. M. Cho, “Fourier analysis for rotating-element ellipsometers,” Opt. Lett. 36, 118–120 (2011). [CrossRef]
  23. G. E. Jellison, “Spectroscopic ellipsometry data analysis: measured versus calculated quantities,” Thin Solid Films 313–314, 33–39 (1998). [CrossRef]
  24. B. Johs, “Regression calibration method for rotating element ellipsometers,” Thin Solid Films 234, 395–398 (1993). [CrossRef]
  25. B. N. Taylor and C. E. Kuyatt, “Guidelines for evaluating and expressing the uncertainty of NIST measurement results,” Tech. Note NIST 1297 (National Institute of Standards and Technology, 1994), pp. 1–20.
  26. S. M. Ross, Introduction to Probability and Statistics for Engineers and Scientists (Elsevier, 2009).
  27. C. M. Herzinger, B. Johs, W. A. McGahan, J. A. Woollam, and W. Paulson, “Ellipsometric determination of optical constants for silicon and thermally grown silicon dioxide via a multi-sample, multi-wavelength, multi-angle investigation,” J. Appl. Phys. 83, 3323–3336 (1998). [CrossRef]
  28. Y. J. Cho, W. Chegal, and H. M. Cho, Department of Industrial Metrology, Korea Research Institute of Standards and Science, 267 Gajeong-Ro, Yuseong-Gu, Daejeon 305-340, Korea, are preparing a manuscript to be called “Optimized precision of multichannel rotating-element spectroscopic ellipsometers.”

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