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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Editor: Franco Gori
  • Vol. 30, Iss. 9 — Sep. 1, 2013
  • pp: 1768–1771

Optimal design and fabrication method for antireflection coatings for P-polarized 193 nm laser beam at large angles of incidence (68°–74°)

Jingcheng Jin, Chunshui Jin, Chun Li, Wenyuan Deng, and Yanhe Chang  »View Author Affiliations

JOSA A, Vol. 30, Issue 9, pp. 1768-1771 (2013)

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Most of the optical axes in modern systems are bent for optomechanical considerations. Antireflection (AR) coatings for polarized light at oblique incidence are widely used in optical surfaces like prisms or multiform lenses to suppress undesirable reflections. The optimal design and fabrication method for AR coatings with large-angle range (68°–74°) for a P-polarized 193 nm laser beam is discussed in detail. Experimental results showed that after coating, the reflection loss of a P-polarized laser beam at large angles of incidence on the optical surfaces is reduced dramatically, which could greatly improve the output efficiency of the optical components in the deep ultraviolet vacuum range.

© 2013 Optical Society of America

OCIS Codes
(310.1210) Thin films : Antireflection coatings
(310.5448) Thin films : Polarization, other optical properties
(310.6805) Thin films : Theory and design

ToC Category:
Thin Films

Original Manuscript: June 10, 2013
Revised Manuscript: July 11, 2013
Manuscript Accepted: July 19, 2013
Published: August 8, 2013

Jingcheng Jin, Chunshui Jin, Chun Li, Wenyuan Deng, and Yanhe Chang, "Optimal design and fabrication method for antireflection coatings for P-polarized 193 nm laser beam at large angles of incidence (68°–74°)," J. Opt. Soc. Am. A 30, 1768-1771 (2013)

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