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Journal of the Optical Society of America A

Journal of the Optical Society of America A


  • Editor: Franco Gori
  • Vol. 31, Iss. 2 — Feb. 1, 2014
  • pp: 217–226

Fast and accurate metrology of multi-layered ceramic materials by an automated boundary detection algorithm developed for optical coherence tomography data

Peter Ekberg, Rong Su, Ernest W. Chang, Seok Hyun Yun, and Lars Mattsson  »View Author Affiliations

JOSA A, Vol. 31, Issue 2, pp. 217-226 (2014)

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Optical coherence tomography (OCT) is useful for materials defect analysis and inspection with the additional possibility of quantitative dimensional metrology. Here, we present an automated image-processing algorithm for OCT analysis of roll-to-roll multilayers in 3D manufacturing of advanced ceramics. It has the advantage of avoiding filtering and preset modeling, and will, thus, introduce a simplification. The algorithm is validated for its capability of measuring the thickness of ceramic layers, extracting the boundaries of embedded features with irregular shapes, and detecting the geometric deformations. The accuracy of the algorithm is very high, and the reliability is better than 1 μm when evaluating with the OCT images using the same gauge block step height reference. The method may be suitable for industrial applications to the rapid inspection of manufactured samples with high accuracy and robustness.

© 2014 Optical Society of America

OCIS Codes
(100.0100) Image processing : Image processing
(110.4500) Imaging systems : Optical coherence tomography
(120.3940) Instrumentation, measurement, and metrology : Metrology
(230.4170) Optical devices : Multilayers
(100.3008) Image processing : Image recognition, algorithms and filters

ToC Category:
Imaging Systems

Original Manuscript: August 22, 2013
Revised Manuscript: October 22, 2013
Manuscript Accepted: December 2, 2013
Published: January 6, 2014

Virtual Issues
Vol. 9, Iss. 4 Virtual Journal for Biomedical Optics

Peter Ekberg, Rong Su, Ernest W. Chang, Seok Hyun Yun, and Lars Mattsson, "Fast and accurate metrology of multi-layered ceramic materials by an automated boundary detection algorithm developed for optical coherence tomography data," J. Opt. Soc. Am. A 31, 217-226 (2014)

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