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Three-dimensional interferometric testing of optical spheres

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Abstract

A theoretical approach to testing full spheres optically to determine the deviation from perfect sphericity is described. Multiple subapertures are employed to obtain interferometrically samples of the object shape over the surface of the object. The data from a complete set of subapertures are combined numerically to generate an estimate of the full three-dimensional object shape in terms of a basis set of spherical harmonics. The results of computer simulations that were designed to investigate the absolute precision of the numerical technique and the expected accuracy in the presence of measurement uncertainty are described and discussed.

© 1987 Optical Society of America

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