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Immersion spectroscopic reflectometry of multilayer systems. II.

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Abstract

The methods of immersion spectroscopic reflectometry presented in the preceding paper [ J. Opt. Soc. Am. A 5, 459 ( 1988)] are employed for the complete optical analysis of typical nonabsorbing single, double, and triple layers, It is shown that these methods are suitable for analyzing such systems from the practical point of view. Advantages of these methods are outlined, and comparisons with other optical methods are made.

© 1988 Optical Society of America

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