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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 5, Iss. 7 — Jul. 1, 1988
  • pp: 1041–1043

Ellipsometry of a thin film between similar media

John Lekner  »View Author Affiliations


JOSA A, Vol. 5, Issue 7, pp. 1041-1043 (1988)
http://dx.doi.org/10.1364/JOSAA.5.001041


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Abstract

The conventional formula for the ellipsometric ratio ρ = rp/rs diverges in the limit when the dielectric constants on either side of an inhomogeneous layer become equal, 1 = 2. The general case, including 1 = 2, necessitates going to second order in the layer thickness. A formula is derived that includes the 1 = 2 case without divergence; the predicted maximum in the imaginary part of ρ when 12 indicates that index matching (of the bounding media) can significantly increase the ellipsometric signal.

© 1988 Optical Society of America

History
Original Manuscript: October 21, 1987
Manuscript Accepted: January 26, 1988
Published: July 1, 1988

Citation
John Lekner, "Ellipsometry of a thin film between similar media," J. Opt. Soc. Am. A 5, 1041-1043 (1988)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-5-7-1041

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