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Journal of the Optical Society of America A

Journal of the Optical Society of America A

| OPTICS, IMAGE SCIENCE, AND VISION

  • Vol. 5, Iss. 7 — Jul. 1, 1988
  • pp: 1066–1072

Simplifications of the bilinear transfer for microscopic binary objects

D. Courjon, D. Charraut, and G. Bou Debs  »View Author Affiliations


JOSA A, Vol. 5, Issue 7, pp. 1066-1072 (1988)
http://dx.doi.org/10.1364/JOSAA.5.001066


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Abstract

Microscopy of binary objects in partially coherent light is analyzed in terms of bilinear transfer. A transfer model using two apparent transfer functions is proposed. Its domain of validity is studied by numerical simulation.

© 1988 Optical Society of America

History
Original Manuscript: December 1, 1986
Manuscript Accepted: March 10, 1988
Published: July 1, 1988

Citation
D. Courjon, D. Charraut, and G. Bou Debs, "Simplifications of the bilinear transfer for microscopic binary objects," J. Opt. Soc. Am. A 5, 1066-1072 (1988)
http://www.opticsinfobase.org/josaa/abstract.cfm?URI=josaa-5-7-1066


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References

  1. See, for example, H. P. Baltes, Inverse Source Problems in Optics, Vol. 9 of Topics in Current Physics, H. P. Baltes, ed. (Springer-Verlag, New York, 1978), pp. 119–154. [CrossRef]
  2. W. M. Bullis, D. Nyyssonen, “Optical linewidth measurements on photomasks and wafers,”VLSI Electron. Microstructure Sci. 3, 301–346 (1982).
  3. H. H. Hopkins, “On the diffraction theory of optical images,” Proc. R. Soc. London Ser. A 217, 408–432 (1953). [CrossRef]
  4. B. Saleh, “Optical bilinear transformations: general properties,” Opt. Acta 26, 777–799 (1979). [CrossRef]
  5. R. Becherer, G. Parrent, “Nonlinearity in optical imaging systems,”J. Opt. Soc. Am. 57, 1479–1486 (1967). [CrossRef]
  6. M. E. Guillaume, N. Noailly, J. C. Reynaud, J. L. Buevoz, “Fourier transform method for optical linewidth measurement,” in Integrated Circuit Metrology II, D. Nyyssonen, ed., Proc. Soc. Photo-Opt. Instrum. Eng.480, 71–77 (1984). [CrossRef]
  7. M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1975), pp. 491–535.
  8. E. Kintner, “Method for the calculation of partially coherent imagery,” Appl. Opt. 17, 2747–2753 (1978). [CrossRef] [PubMed]
  9. D. Courjon, D. Charraut, P. Livrozet, “Bilinear transfer in microscopy,” Opt. Acta 34, 127–136 (1987).
  10. M. E. Guillaume, N. Noailly, M. Pichot, J. L. Buevoz, “Evaluation of a Fourier transform method for accurate critical dimension measurements,” Microcircuit Eng. 3, 211–218 (1985). [CrossRef]

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